Application of all-solid-state high-voltage pulse power supply in semiconductor lithography light source

You Libing; Cheng Chao; Fang Xiaodong

doi:10.11884/HPLPB201931.190001

Volume 31 Issue 4

Apr. 2019

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You Libing, Cheng Chao, Fang Xiaodong. Application of all-solid-state high-voltage pulse power supply in semiconductor lithography light source[J]. High Power Laser and Particle Beams, 2019, 31: 040019. doi: 10.11884/HPLPB201931.190001

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You Libing, Cheng Chao, Fang Xiaodong. Application of all-solid-state high-voltage pulse power supply in semiconductor lithography light source[J]. High Power Laser and Particle Beams, 2019, 31: 040019. doi: 10.11884/HPLPB201931.190001

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Application of all-solid-state high-voltage pulse power supply in semiconductor lithography light source

doi: 10.11884/HPLPB201931.190001

You Libing^1
,,
Cheng Chao^{1, 2},
Fang Xiaodong^{1, 2}

1.
Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics of Chinese Academy of Sciences, Hefei 230031, China
2.
School of Science Island, University of Science and Technology of China, Hefei 230026, China

Received Date: 2019-01-01
Rev Recd Date: 2019-02-20
Publish Date: 2019-04-15

Abstract

Abstract

The basic principle and application of high-voltage pulse power supply are briefly described, the principle and characteristics of all-solid-state high-voltage pulse power supply are introduced. The history of semiconductor lithography and the need for excimer lasers as light sources in semiconductor lithography are reviewed. The application of all-solid-state high-voltage pulse power supply in excimer laser for lithography is emphasized. The high-power semiconductor switch combined with multi-stage magnetic pulse compression switch is used to replace the traditional thyristor-based high-voltage pulse power supply, and a long life operation of the excimer laser at a high repetition rate is achieved. The progress of the research on the all-solid-state high-voltage pulse power supply of excimer lasers in the past ten years of Anhui Institute of Optics and Fine Mechanics of Chinese Academy of Sciences is also introduced. Finally, the future demand for all-solid-state pulsed power sources for semiconductor lithography sources is expected.
- all-solid-state high-voltage pulse power supply,
- semiconductor lithography,
- excimer laser,
- magnetic switch,
- thyratron

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References(20)

References

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