光学元件的激光损伤问题

赵元安; 邵建达; 刘晓凤; 李大伟

doi:10.11884/HPLPB202234.210331

光学元件的激光损伤问题

doi: 10.11884/HPLPB202234.210331

赵元安^{1, 2,},
邵建达^{1, 2},
刘晓凤^{1, 2},
李大伟^{1, 2}

1.
中国科学院上海光学精密机械研究所薄膜光学实验室, 上海 201800
2.
中国科学院强激光材料重点实验室, 上海 201800

详细信息

作者简介:
赵元安，yazhao@siom.ac.cn

中图分类号: O436
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- 被引次数: 0
出版历程
- 收稿日期: 2021-07-30
- 修回日期: 2021-10-26
- 网络出版日期: 2021-10-21
- 刊出日期: 2022-01-15

Tracking and understanding laser damage events in optics

Zhao Yuanan^{1, 2
,},
Shao Jianda^{1, 2},
Liu Xiaofeng^{1, 2},
Li Dawei^{1, 2}

1.
Laboratory of Thin Film Optics, Shanghai Institute of Optics and Fine Mechanics, Shanghai 201800, China
2.
Key Laboratory of High Power Laser Materials, Shanghai Institute of Optics and Fine Mechanics, Shanghai 201800, China

摘要

摘要: 光学元件是各类激光系统不可或缺的光学功能实现部件，其性能决定了激光系统的输出能力和光束质量。光学元件的激光损伤问题从激光发明起就一直伴随着激光技术的发展，随着激光新技术的发展和激光新应用的牵引，激光的波段、脉冲宽度以及重复频率等参数不断拓宽，使得激光损伤问题更加复杂，但万变不离其宗，激光损伤问题的核心是光学元件或光学材料对激光的吸收机制问题。从激光与光学材料相互作用的基本原理出发，以惯性约束聚变（ICF）激光驱动器应用的典型光学材料和光学元件为研究对象，回顾了针对光学元件的激光损伤问题开展的科研工作，总结了在此期间形成的关键技术和里程碑进展，同时也对依然困扰该领域的几类光学元件存在的问题瓶颈以及进一步研究发展趋势进行了展望。
- 激光损伤 /
- 光学元件 /
- 高功率激光 /
- 吸收机制 /
- 微观缺陷 /
- 纳观尺度激光损伤前驱体
Abstract: Optics are indispensable components for realizing optical functions of various laser systems, and their performances determine the output capability and beam quality of the laser system. Laser damage of optics have accompanied the developments of laser technologies since the invention of laser. With the development of new laser technologies and tractions of new laser applications, laser parameters such as the wavelength, pulse width and repetition frequency have been expanded, making laser damage more complicated. However, remaining essentially the same, the core of laser damage is the absorption mechanism of optics or optical materials. Starting from the basic principles of the interaction between laser and optical materials, this paper focuses on the typical optical materials and optics used in domestic inertial confinement fusion (ICF) laser drivers, and reviews the scientific research on laser damage of optics. Then, it summarizes the key technologies and milestone progress formed during this period. At last, it predicts several types of bottleneck optics that still plagued this field as well as the development of further research.
- laser damage /
- optics /
- high power laser /
- absorption mechanism /
- micro-scale defects /
- nanoscale laser damage precursors

HTML全文

图 1 节瘤缺陷的剖面结构^[19]

Figure 1. Cross sections of nodules^[19]

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图 2 节瘤缺陷诱导的电场、温度场、热应力分布

Figure 2. Distributions of electric field, temperature and thermal stress induced by the nodule

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图 3 节瘤缺陷的典型损伤形貌

Figure 3. Typical damage morphologies of nodules

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图 4 79.8 J/cm²能流扫描下节瘤缺陷的抗激光损伤特性^[19]

Figure 4. Laser damage characteristics of nodular defects under the fluence of 79.8 J/cm^2[19]

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图 5 纳观尺度激光损伤前驱体诱导的典型损伤形貌

Figure 5. Typical damage morpholgies induced by nanoscale laser damage precursors

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图 6 连续过滤技术用于提升KDP晶体抗激光损伤能力^[27]

Figure 6. Laser damage resistance enhancement of KDP crystals by continuous filtration techniques^[27]

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图 7 不加连续过滤（NCF）、0.1 μm滤孔一级过滤（SCF）、0.1 μm和0.03 μm滤孔二级过滤（TCF）样品的损伤几率^[28]

Figure 7. Laser damage probability curves for KDP samples grown with no filter (NCF), only 0.1 μm filter (SCF) and two levels of filter (0.1 μm and 0.03 μm) (TCF) in continuous filtration unit^[28]

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图 8 KDP晶体中损伤前驱体的阈值分布及尺度分布^[28]

Figure 8. Laser induced damage thresholds (LIDTs) and sizes of laser damage precursors in KDP crystals^[28]

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图 9 HfO₂/SiO₂多层膜的损伤形貌(a)俯视，(b)(c)切面图^[31]

Figure 9. Damage morpholgies of HfO₂/SiO₂ multilayer films. (a) top view, (b)(c) section view. ^[31]

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图 10 半径为10 nm 的缺陷在0.8 J/cm²（1064 nm，30 ps）激光辐照下的膜层温度分布^[31]

Figure 10. Temperature simulation of the defect with the radius of 10 nm irradiated by the fluence of 0.8 J/cm²（1064 nm, 30 ps）^[31]

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图 11 温升模拟与损伤形态的对比^[31]

Figure 11. Comparison of the temperature simulation and damage morphology^[31]

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图 12 损伤点不同位置的温度^[31]

Figure 12. Temperatures of different locations in the damage area^[31]

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图 13 小光斑扫描激光预处理流程示意图

Figure 13. Schematic diagram of small-beam raster-scan laser conditioning

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图 14 大口径光学元件激光预处理平台^[35]

Figure 14. Laser conditioning platforms for large optics^[35]

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图 15 预处理后大口径介质膜的激光损伤阈值（TM：传输反射镜；ZJ：肘镜；PL：偏振片）^[35]

Figure 15. LIDTs of large-aperture dielectric films after laser conditioning (TM: transport mirror;ZJ: elbow mirror; PL: polarizer^[35]

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图 16 预处理后介质膜的表面状态^[35]

Figure 16. Surface state of the conditioned dielectric films^[35]

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图 17 等离子体烧蚀损伤对光束质量及元件PSD2的影响^[35]

Figure 17. Influences of plasma scalds on the beam quality and PSD2^[35]

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图 18 DKDP晶体的亚纳秒激光预处理的抗激光损伤性能提升效果

Figure 18. Laser damage resistance enhancement of KDP crystals by sub-nanosecond laser conditioning

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表 1 不同滤孔生长的 KDP晶体中损伤前驱体的信息^[28]

Table 1. Information of the laser damage precursors for KDP crystals grown with differently sized filter pores^[28]

sample ρ₀/mm⁻³ T₀ /(J/cm²) ΔT/(J/cm²)

NCF 3.75 24.8 10.5
SCF 2.59 33.3 14.6
TCF 0.42 81.4 41.3

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