Magnetorheological finishing removal stability of large aperture aspherical optics
-
摘要: 重点分析了非球面元件磁流变加工的动态稳定性影响因素。设计了非球面元件的自动装调定位系统，提高了装调精度。采用一种拟合光栅式加工的新方法来验证其效果，通过测量元件表面形成的直线沟壑深度、宽度波动比例来评价去除的动态稳定性。在400 mm400 mm口径的方形非球面元件上进行面形收敛验证实验，波长为632.8 nm时，加工后的透射波前误差PV值达到0.331，低频透射波前梯度误差GRMS值达到了0.008/cm。Abstract: In this paper, the factors of dynamic stability of the removal function were analyzed. In order to improve the precision of magnetorheological finishing (MRF), an automatic positioning system of aspherical optics was designed. A new approach was used for evaluating dynamic characteristics of removal function. At the same time, a verification experiment was carried out on 400 mm400 mm square aspheric, the PV of the surface precision was 0.331 and the GRMS value was 0.008 /cm. The ability of aspherical optics of the magneto-rheological processing was verified.
-
Key words:
- magnetorheological finishing /
- aspherical optics /
- surface precision /
- dynamic stability
-
点击查看大图
计量
- 文章访问数: 1090
- HTML全文浏览量: 162
- PDF下载量: 243
- 被引次数: 0
下载:
