Abstract: The energy loss mechanism and the influence of the kinetic energy on the energy deposition of incident electrons in collectors were analyzed theoretically. Using Monte Carlo method, the energy deposition in collectors of electron beams with different kinetic energies was calculated. The influence of kinetic energy on the energy deposition was analyzed, and two ways were proposed to improve the resistance of collectors to electron beam impact. It was found that excitation and ionization was the major mechanism leading to electrons losing energy. Electrons with higher kinetic energy penetrated further in the collector, but the maximum energy density deposited was lower. Considering the influence of beam distribution on the energy deposition, two ways were put forward to improve the collectors: one was to enlarge the collecting area through structure optimization, and the other was to design HPM generators with higher resistance.