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考虑光镊效应的飞秒激光双光子加工线宽

童唯扬 王正岭

童唯扬, 王正岭. 考虑光镊效应的飞秒激光双光子加工线宽[J]. 强激光与粒子束, 2018, 30: 034102. doi: 10.11884/HPLPB201830.170294
引用本文: 童唯扬, 王正岭. 考虑光镊效应的飞秒激光双光子加工线宽[J]. 强激光与粒子束, 2018, 30: 034102. doi: 10.11884/HPLPB201830.170294
Tong Weiyang, Wang Zhengling. Linewidth of femtosecond laser two-photon processing considering optical tweezers[J]. High Power Laser and Particle Beams, 2018, 30: 034102. doi: 10.11884/HPLPB201830.170294
Citation: Tong Weiyang, Wang Zhengling. Linewidth of femtosecond laser two-photon processing considering optical tweezers[J]. High Power Laser and Particle Beams, 2018, 30: 034102. doi: 10.11884/HPLPB201830.170294

考虑光镊效应的飞秒激光双光子加工线宽

doi: 10.11884/HPLPB201830.170294
基金项目: 

江苏省自然科学基金项目 BK20161342

江苏省“六大人才高峰”高层次人才项目 GDZB-018

江苏省高校自然科学研究重大基金项目 15KJA140001

详细信息
    作者简介:

    童唯扬(1993—),男,硕士研究生, 从事飞秒激光与物质相互作用及双光子加工等研究工作; 434552776@qq.com

    通讯作者:

    王正岭(1971—),男,博士,从事微纳米光学与原子光学研究工作; zlwang@ujs.edu.cn

  • 中图分类号: TN305

Linewidth of femtosecond laser two-photon processing considering optical tweezers

  • 摘要: 采用自由基浓度起伏理论结合光镊集聚效应,理论研究了飞秒激光双光子加工的线宽问题。根据双光子光聚合过程中自由基浓度随时间变化的关系,考虑光镊效应对自由基分布范围的影响,得到了飞秒激光双光子加工线宽的表达式。研究了线宽随扫描速度与激光功率的变化关系,并讨论了不同光引发剂对线宽的影响。得到了以自由基浓度起伏为基础,并考虑光镊效应的双光子加工线宽表达式,该结果与实验结果相符。研究结果为飞秒激光双光子加工的研究提供了新的思路,为光镊集聚效应对线宽影响的实验研究提供了理论依据。
  • 图  1  自由基浓度的径向分布与脉冲次数的变化关系

    Figure  1.  Relationship between free radical density and pulse number

    图  2  线宽随扫描速度和激光功率的变化关系

    Figure  2.  Linewidth varies with scanning speed and laser power

    图  3  考虑不同条件下飞秒激光光镊效应对于加工线宽的影响

    Figure  3.  Effect of optical tweezers on the processing line width under different conditions

    图  4  考虑光镊效应的线宽随扫描速度和激光功率的等值线图

    Figure  4.  Contour of linewidth with scanning speed and laser power considering optical tweezers

  • [1] 宋旸, 董贤子, 赵震声, 等. 飞秒激光双光子加工的极限分辨力[J]. 强激光与粒子束, 2011, 23 (7): 1780-1784. http://www.hplpb.com.cn/article/id/5345

    Song Yang, Dong Xianzi, Zhao Zhensheng, et al. Investigation into ultimate resolution by femtosecond laser two-photon fabrication technique. High Power Laser and Particle Beams, 2011, 23 (7): 1780-1784 http://www.hplpb.com.cn/article/id/5345
    [2] Kawata S, Sun H B, Tanaka T, et al. Finer features for functional microdevices[J]. Nature, 2001, 412 : 697-698. doi: 10.1038/35089130
    [3] Takada K, Sun H B, Kawata S. Improved spatial resolution and surface roughness in photo polymerization-based laser nano writing[J]. Appl Phys Lett, 2005, 86 (7): 132.
    [4] Tan Dengfeng, Li Yan. Reduction in feature size of two-photon polymerization using SCR500[J]. Appl Phys Lett, 2007, 90 (7): 169.
    [5] Jin Fengxing, Dong Xianzi. Improving spatial resolution of two-photon microfabrication by using photoinitiator with high initiating efficiency[J]. Appl Phys Lett, 2007, 90 (13): 51.
    [6] Takada K, Kawata S. Size-dependent behaviors of femtosecond laser-prototyped polymer micronanowires[J]. Optics Letters, 2009, 340 : 566-568.
    [7] 林乐, 郑美玲, 董贤子, 等. 径向偏振光对微纳尺度聚合物结构纵向分辨率的改善[J]. 量子电子学报, 2017, 34 (1): 76-80. https://www.cnki.com.cn/Article/CJFDTOTAL-LDXU201701012.htm

    Lin Le, Zheng Meiling, Dong Xianzi, et al. Improvement of longitudinal resolution of micro/nano scale polymer structure with radially polarized beam. Chinese Journal of Quantum Electronics, 2017, 34 (1): 76-80 https://www.cnki.com.cn/Article/CJFDTOTAL-LDXU201701012.htm
    [8] 宋旸, 董贤子, 赵震声, 等. SU-8胶双光子微加工分辨率与工艺条件研究[J]. 微纳电子技术, 2011, 48 (1): 40-45. https://www.cnki.com.cn/Article/CJFDTOTAL-BDTQ201101007.htm

    Song Yang, Dong Xianzi, Zhao Zhensheng, et al. Resolution of SU-8 photoresist in two-photon polymerization microfabrication and research of fabrication conditions. MEMS and Sensors, 2011, 48 (1): 40-45 https://www.cnki.com.cn/Article/CJFDTOTAL-BDTQ201101007.htm
    [9] Maruo S, Nakamura O, Kawata S. Three-dimensional microfabrication with two-photon absorbed photo polymerization[J]. Optics Letters, 1997, 22 : 132-134.
    [10] 毛方林, 邢岐荣. 飞秒激光光镊横向光学力的理论分析[J]. 光子学报, 2004, 33 (5): 513-516. https://www.cnki.com.cn/Article/CJFDTOTAL-GZXB200405000.htm

    Mao Fanglin, Xing Qirong. Analysis of the lateral optical force applied by the femtosecond laser tweezers. Acta Photonica Sinica, 2004, 33 (5): 513-516 https://www.cnki.com.cn/Article/CJFDTOTAL-GZXB200405000.htm
    [11] Xu S H, Li Y M, Lou L R. Systematical study of the trapping forces of optical tweezers formed by different types of optical ring beams[J]. Chinese Physics B, 2006, 15 (6): 1391-1397.
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出版历程
  • 收稿日期:  2017-07-15
  • 修回日期:  2017-11-06
  • 刊出日期:  2018-03-15

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