考虑光镊效应的飞秒激光双光子加工线宽

童唯扬; 王正岭

doi:10.11884/HPLPB201830.170294

考虑光镊效应的飞秒激光双光子加工线宽

doi: 10.11884/HPLPB201830.170294

童唯扬,
王正岭^,

江苏大学理学院, 江苏镇江 212013

基金项目:

江苏省自然科学基金项目 BK20161342

江苏省“六大人才高峰”高层次人才项目 GDZB-018

江苏省高校自然科学研究重大基金项目 15KJA140001

详细信息

作者简介:
童唯扬(1993—)，男，硕士研究生, 从事飞秒激光与物质相互作用及双光子加工等研究工作; 434552776@qq.com

通讯作者:
王正岭(1971—)，男，博士，从事微纳米光学与原子光学研究工作; zlwang@ujs.edu.cn

中图分类号: TN305
计量
- 文章访问数: 1434
- HTML全文浏览量: 310
- PDF下载量: 157
- 被引次数: 6
出版历程
- 收稿日期: 2017-07-15
- 修回日期: 2017-11-06
- 刊出日期: 2018-03-15

Linewidth of femtosecond laser two-photon processing considering optical tweezers

Tong Weiyang,
Wang Zhengling^,

Faculty of Science, Jiangsu University, Zhenjiang 212013, China

摘要

摘要: 采用自由基浓度起伏理论结合光镊集聚效应，理论研究了飞秒激光双光子加工的线宽问题。根据双光子光聚合过程中自由基浓度随时间变化的关系，考虑光镊效应对自由基分布范围的影响，得到了飞秒激光双光子加工线宽的表达式。研究了线宽随扫描速度与激光功率的变化关系，并讨论了不同光引发剂对线宽的影响。得到了以自由基浓度起伏为基础，并考虑光镊效应的双光子加工线宽表达式，该结果与实验结果相符。研究结果为飞秒激光双光子加工的研究提供了新的思路，为光镊集聚效应对线宽影响的实验研究提供了理论依据。
- 飞秒激光 /
- 双光子 /
- 线宽 /
- 自由基浓度 /
- 光镊效应
Abstract: In this paper, the linewidth of femtosecond laser two-photon polymerization is studied by the theory of free radical density and the effect of optical tweezers. Based on the relationship between free radical density and time in the process of two-photon polymerization, the expression of linewidth of two-photon femtosecond laser processing is deduced considering the effect of optical tweezers. The relationship of linewidth with scanning speed and laser power is studied and the influence of different light initiators on the linewidth is also discussed. The theoreticial result agrees well with the experimental one in the literature. The result of this paper gives a new idea for the study of femtosecond laser two-photon processing, and provides a theoretical formula for the study of the influence of optical tweezers on linewidth.
- femtosecond laser /
- two-photon /
- linewidth /
- free radical density /
- optical tweezers

HTML全文

图 1 自由基浓度的径向分布与脉冲次数的变化关系

Figure 1. Relationship between free radical density and pulse number

下载: 全尺寸图片幻灯片

图 2 线宽随扫描速度和激光功率的变化关系

Figure 2. Linewidth varies with scanning speed and laser power

下载: 全尺寸图片幻灯片

图 3 考虑不同条件下飞秒激光光镊效应对于加工线宽的影响

Figure 3. Effect of optical tweezers on the processing line width under different conditions

下载: 全尺寸图片幻灯片

图 4 考虑光镊效应的线宽随扫描速度和激光功率的等值线图

Figure 4. Contour of linewidth with scanning speed and laser power considering optical tweezers

下载: 全尺寸图片幻灯片

参考文献(11)

[1]	宋旸, 董贤子, 赵震声, 等. 飞秒激光双光子加工的极限分辨力[J]. 强激光与粒子束, 2011, 23 (7): 1780-1784. http://www.hplpb.com.cn/article/id/5345 Song Yang, Dong Xianzi, Zhao Zhensheng, et al. Investigation into ultimate resolution by femtosecond laser two-photon fabrication technique. High Power Laser and Particle Beams, 2011, 23 (7): 1780-1784 http://www.hplpb.com.cn/article/id/5345
[2]	Kawata S, Sun H B, Tanaka T, et al. Finer features for functional microdevices[J]. Nature, 2001, 412 : 697-698. doi: 10.1038/35089130
[3]	Takada K, Sun H B, Kawata S. Improved spatial resolution and surface roughness in photo polymerization-based laser nano writing[J]. Appl Phys Lett, 2005, 86 (7): 132.
[4]	Tan Dengfeng, Li Yan. Reduction in feature size of two-photon polymerization using SCR500[J]. Appl Phys Lett, 2007, 90 (7): 169.
[5]	Jin Fengxing, Dong Xianzi. Improving spatial resolution of two-photon microfabrication by using photoinitiator with high initiating efficiency[J]. Appl Phys Lett, 2007, 90 (13): 51.
[6]	Takada K, Kawata S. Size-dependent behaviors of femtosecond laser-prototyped polymer micronanowires[J]. Optics Letters, 2009, 340 : 566-568.
[7]	林乐, 郑美玲, 董贤子, 等. 径向偏振光对微纳尺度聚合物结构纵向分辨率的改善[J]. 量子电子学报, 2017, 34 (1): 76-80. https://www.cnki.com.cn/Article/CJFDTOTAL-LDXU201701012.htm Lin Le, Zheng Meiling, Dong Xianzi, et al. Improvement of longitudinal resolution of micro/nano scale polymer structure with radially polarized beam. Chinese Journal of Quantum Electronics, 2017, 34 (1): 76-80 https://www.cnki.com.cn/Article/CJFDTOTAL-LDXU201701012.htm
[8]	宋旸, 董贤子, 赵震声, 等. SU-8胶双光子微加工分辨率与工艺条件研究[J]. 微纳电子技术, 2011, 48 (1): 40-45. https://www.cnki.com.cn/Article/CJFDTOTAL-BDTQ201101007.htm Song Yang, Dong Xianzi, Zhao Zhensheng, et al. Resolution of SU-8 photoresist in two-photon polymerization microfabrication and research of fabrication conditions. MEMS and Sensors, 2011, 48 (1): 40-45 https://www.cnki.com.cn/Article/CJFDTOTAL-BDTQ201101007.htm
[9]	Maruo S, Nakamura O, Kawata S. Three-dimensional microfabrication with two-photon absorbed photo polymerization[J]. Optics Letters, 1997, 22 : 132-134.
[10]	毛方林, 邢岐荣. 飞秒激光光镊横向光学力的理论分析[J]. 光子学报, 2004, 33 (5): 513-516. https://www.cnki.com.cn/Article/CJFDTOTAL-GZXB200405000.htm Mao Fanglin, Xing Qirong. Analysis of the lateral optical force applied by the femtosecond laser tweezers. Acta Photonica Sinica, 2004, 33 (5): 513-516 https://www.cnki.com.cn/Article/CJFDTOTAL-GZXB200405000.htm
[11]	Xu S H, Li Y M, Lou L R. Systematical study of the trapping forces of optical tweezers formed by different types of optical ring beams[J]. Chinese Physics B, 2006, 15 (6): 1391-1397.

施引文献

期刊类型引用(3)

1.	李醒飞，何梦洁，拓卫晓，王天宇，韩佳欣，王信用. 应用于运动平台光电跟瞄系统的惯性参考单元研究综述. 光学精密工程. 2024(03): 401-421 . 百度学术
2.	冯志刚，王鹏. 交通执法光电跟踪系统设计与实现. 传感技术学报. 2024(06): 1090-1098 . 百度学术
3.	周占民，李贤涛，毛大鹏，张保. 永磁同步电机驱动的小型三轴机载光电平台鲁棒控制系统设计. 国外电子测量技术. 2023(05): 119-124 . 百度学术