一阶不连续光学元件MRF流体动力学分析方法

杨航; 刘小雍; 马登秋; 张云飞; 黄文; 何建国

doi:10.11884/HPLPB201931.180340

一阶不连续光学元件MRF流体动力学分析方法

doi: 10.11884/HPLPB201931.180340

杨航^1,,
刘小雍¹,
马登秋¹,
张云飞^{2, 3},
黄文^{2, 3},
何建国²

1.
遵义师范学院工学院, 贵州遵义 563006
2.
中国工程物理研究院机械制造工艺研究所, 四川绵阳 621900
3.
中国工程物理研究院超精密加工技术重点实验室, 成都 610200

基金项目:

贵州省科技计划项目黔科合LH字[2017]7081

贵州省科技计划项目黔科合基础[2018]1179

贵州省教育厅青年科技人才成长项目黔教合KY字[2017]249

贵州省教育厅青年科技人才成长项目黔教合KY字[2018]319

贵州省教育厅青年科技人才成长项目黔教合KY字[2016]254

教育部重点实验室开放基金课题项目黔教合KY字[2017]385

详细信息

作者简介:
杨航(1989-)，男，讲师，主要从事超精密加工装备技术与工艺理论研究；yhangde@mail.dlut.edu.cn

中图分类号: TH164
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- 被引次数: 0
出版历程
- 收稿日期: 2018-11-28
- 修回日期: 2019-01-18
- 刊出日期: 2019-02-15

Fluid dynamics analysis method for MRF of first order discontinuous optical elements

1.
Department of Engineering, Zunyi Normal College, Zunyi 563006, China
2.
Institute of Mechanical Manufacturing Technology, CAEP, Mianyang 621900, China
3.
Key Laboratory of High-precision Machining Technology, CAEP, Chengdu 610200, China

摘要

摘要: 一阶不连续光学元件的磁流变抛光问题是制约我国高精高效光学制造领域发展的难题之一，其涉及锥形、矩形等几何形貌元件的光学元件加工问题以及常见光学元件的边缘效应控制问题。提出了基于一阶不连续光学元件的磁流变抛光流体动力学方法，建立了该类元件抛光区域流体动力分析的理论方法和数值手段。首先，对磁流变抛光工况下的流场进行了合理假设，其次，从微元流体动力方程出发，建立了适用于一阶不连续面形的流场分析方法，最后，基于有限差分法和数值迭代方法建立了流场控制方程的数值计算方法。通过对切入距离为1~18 mm的抛光过程进行数值仿真，发现该方法所获取的一阶不连续面形的压力分布形态是正确的，产生的不连续压降与实验观测一致。
- 一阶不连续光学元件 /
- 边缘效应 /
- 磁流变抛光 /
- 流体动力学分析 /
- 超精密加工
Abstract: Magnetorheological finishing of first-order discontinuous optical elements is one of the difficult problems that restrict the development of high-precision and high-efficiency optical manufacturing in China. In this paper, a fluid dynamics analysis method for magnetorheological finishing concerning the first order discontinuous optical elements is presented. Firstly, reasonable assumptions are made for the flow field under the practical condition of magnetorheological finishing. Secondly, based on the micro-element hydrodynamic equation, a flow field analysis method suitable for the first order discontinuous surface shape is established. Finally, a numerical calculation method for the flow field governing equation is established based on the finite difference method and numerical iteration method. Through numerical simulation for cutting distance ranging over 1~18 mm, it is found that the pressure distribution pattern of the first-order discontinuous surface obtained by the proposed method is correct, and the discontinuous pressure drop generated by the proposed method is consistent with that of the experimental observation.
- first order discontinuous optical element /
- edge effect /
- magnetorheological finishing /
- hydrodynamic analysis /
- ultra-precision machining

HTML全文

图 1 磁流变抛光原理与典型设备示意图

Figure 1. Schematic diagram of magnetorheological finishing principle and typical equipment

下载: 全尺寸图片幻灯片

图 2 光学镜面磁流变抛光中常见的一阶不连续曲面示意

Figure 2. Schematic diagram of the first order discontinuous surfaces commonly seen in magnetorheological finishing of optical mirrors

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图 3 一阶不连续面形磁流变抛光边缘缺陷干涉仪测量结果

Figure 3. Interferometeric measurement results of MRF edge defect of first-order discontinuous part

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图 4 磁流变抛光区域工况及参数定义示意图

Figure 4. Schematic diagram of working conditions and parameter definitions in MRF

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图 5 磁流变抛光区域流场微元体受力示意图

Figure 5. Force diagram of flow field elements in magnetorheological finishing area

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图 6 磁流变抛光区域流场网络分布关系

Figure 6. Distribution of flow field network in magnetorheological finishing region

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图 7 切入距离为1~18 mm时磁流变抛光压力场计算结果

Figure 7. Calculation results of MRF pressure field when the cutting distance is 1~18 mm

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图 8 切入距离为17 mm时磁流变抛光压力场三维图

Figure 8. Three-dimensional diagram of MRF pressure field when the cutting distance is 17 mm

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图 9 实验获取的切入距离为1~18 mm的抛光斑

Figure 9. Polishing spots with a cutting distance of 1~18 mm

下载: 全尺寸图片幻灯片

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