A microwave plasma system with quasi optical focusing reflector
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摘要: 设计了一种准光反射聚焦方式的微波放电大气等离子体实验装置，装置包括大气环境模拟室和微波辐射聚焦系统。辐射微波在腔室中心形成kV/cm量级的非均匀强场，击穿大气产生等离子体。通过仿真计算了腔室内的空间辐射场分布，并利用小信号传递的方式进行测量，测量结果与仿真相符，形成的等离子体形态与辐射场分布强弱一致。电磁场在聚焦区域形成驻波，等离子体出现明显分层现象。实验通过拍照记录了不同参数条件下的等离子体图样，等离子体形态随气压升高而收缩，放电区域受场强和气压共同影响。对实验结果进行分析，验证了该装置的能力。Abstract: Microwave discharge is a kind of non-polar mode, which may form plasma that has the characteristics of transient, low temperature, non-equilibrium and so on at atmospheric pressure. A microwave plasma experimental facility with quasi optical focusing reflector is introduced, including the atmospheric environment simulation chamber and microwave transmission focusing system. A non-uniform strong electric field of kV/cm magnitude formed by focusing microwave power in the chamber, with plasma motivated in the central region. The distribution of the electric field in the chamber is calculated and measured. The results are in good agreement. And the shape of the plasma is also consistent with the intensity of the electric field. The plasma images under different parameters were observed by the camera through the device. The capability of the device was verified, which laid a foundation for further study of microwave atmospheric breakdown.
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Key words:
- microwave discharge /
- plasma /
- focusing reflector /
- electric field measurement /
- breakdown threshold
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图 3 测量与仿真电场分布对比
Figure 3. Comparison of measured and simulated electric field distribution
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