一种消除弯晶面形扭曲的轴角装置

杨佼汪; 刘旭; 曹刚; 蔡泉; 盛伟繁

doi:10.11884/HPLPB201931.190046

一种消除弯晶面形扭曲的轴角装置

doi: 10.11884/HPLPB201931.190046

杨佼汪^{1, 2,},
刘旭¹,
曹刚^{1, 2},
蔡泉^1, ,,
盛伟繁^{1, 2, ,}

1.
中国科学院高能物理研究所, 北京 100049
2.
中国科学院大学, 北京 100049

基金项目:

国家重点研发计划项目 2017YFA0403000

详细信息

作者简介:
杨佼汪(1988—)，男，博士研究生，主要研究方向为核技术及应用; yangjiaowang@ihep.ac.cn

通讯作者:
蔡泉(1980—)，男，副研究员，主要研究方向为凝聚态物理和同步辐射技术；caiq@ihep.ac.cn

盛伟繁(1962—)，男，研究员，主要研究方向为同步辐射光学及光束线技术的研究；shengwf@ihep.ac.cn

中图分类号: O432.1
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- 被引次数: 0
出版历程
- 收稿日期: 2019-05-15
- 修回日期: 2019-06-02
- 刊出日期: 2019-09-15

A rotary mechanism for eliminating the twist of bent crystal

Yang Jiaowang^{1, 2
,},
Liu Xu¹,
Cao Gang^{1, 2},
Cai Quan^{1
, ,},
Sheng Weifan^{1, 2
, ,}

1.
Institute of High Energy Physics, Chinese Acadeny of Sciences, Beijing 100049, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China

摘要

摘要: Laue晶体单色器常用于单色化高能X射线(＞50 keV)，通过对其晶片压弯可以实现高能光束聚焦。晶片压弯过程中会不可避免地产生扭曲，从而影响单色器的工作效率。利用波动光学仿真的方法，分析弯晶面形扭曲对Laue晶体单色器性能的影响，并提出一种角位移微调轴角装置，用来消除这种扭曲。该装置基于直梁型柔性铰链，利用叠加原理和对称结构。利用有限元方法分析了该装置的力学性能。分析结果表明，轴角装置的转角范围为±2°时，其转动中心最大偏移为20 μm，实现了角位移分辨率好于1″，动态范围达到10⁴，达到设计目标。
- Laue晶体单色器 /
- 光学仿真 /
- 轴角装置 /
- 柔性铰链 /
- 压弯机构
Abstract: Laue crystal monochromator are commonly used to monochromate high-energy X-rays (above 50 keV). Through bending the thin crystal, focused monochromatic beams could be obtained. However, twisted deformation would inevitably occur during bending crystal, which seriously affects monochromator efficiency. In this paper, wave optics simulation method was applied to study the influence of the bent crystal twisted on the performance of the Laue crystal monochromator. Moreover, in order to eliminate the crystal twist, a rotary mechanism of rotation angle fine adjustment was designed. The rotary mechanism includes a series of flexure hinges arranged symmetrically. Furthermore, the dynamics performances of the mechanism were also analyzed by using finite element method. The results show that when the rotation angle was within ±2°, the maximum shift of rotation center was less than 20 μm, the angular resolution achieved less than 1″ and dynamic range was up to 10⁴, which totally meet the design requirements.
- Laue crystal monochromator /
- optical simulation /
- rotary mechanism /
- flexure hinge /
- bending mechanism

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图 1 (a) 晶体压弯机构；(b)理想鞍型的弯晶面型；(c)扭曲变形后的弯晶面形

Figure 1. (a) Schematic of the bending mechanism; (b) the ideal saddle figure and (c) saddle figure with the twisted deformation

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图 2 用XRT仿真的100 keV光子在样品处的光斑

Figure 2. At the sample position, beam spot is simulated by XRT with the photon energy of 100 keV

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图 3 轴角装置的3D(a)和2D(b)结构模型

Figure 3. 3D (a) and 2D (b) models of the rotary mechanism

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图 4 轴角装置的等效刚度

Figure 4. Equivalent stiffness of the rotary mechanism

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图 5 直梁型柔性铰链的坐标系

Figure 5. Coordinate system of the beam flexure hinge

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图 6 轴角装置转动2°时, 中心点的偏移量随着直梁长度变化

Figure 6. The center shift varies with the length of the beam flexure hinge when the rotation angle of the rotary mechanism is 2°

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图 7 轴角装置转动2°时，最大应力随着直梁长度变化

Figure 7. The maximum stress varies with the length of the beam flexure hinge when the rotation angle of the rotary mechanism is 2°

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图 8 L₁=55 mm，转角为2°时，利用有限元计算得到的轴角装置(a)等效应力和(b)剪切应力分布图

Figure 8. Distributions of (a) equivalent stress and (b) shear stress simulated by using FEA for the rotary mechanism, at L₁=55 mm and rotation of 2°

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图 9 轴角装置转动力矩与转动角度的关系图

Figure 9. Relationship between the rotation angles and the rotation moments

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图 10 装配在压弯机构上的轴角装置样机

Figure 10. Prototype of the rotary mechanism assembled on the crystal bender

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图 11 (a) 晶体压弯后存在扭曲的面形误差；(b)经过校正的弯晶面形误差

Figure 11. (a) surface error with the twisted deformation after bending; (b) surface error after adjustment

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参考文献(14)

[1]	Jiao Yi, Xu Gang, Cui Xiaohao, et al. The HEPS project[J]. Journal of Synchrotron Radiation, 2018, 25(6): 1611-1618. doi: 10.1107/S1600577518012110
[2]	姜晓明, 王九庆, 秦庆, 等. 中国高能同步辐射光源及其验证装置工程[J]. 中国科学: 物理学力学天文学, 2014, 44: 1075-1094. https://www.cnki.com.cn/Article/CJFDTOTAL-JGXK201410009.htm Jing Xiaoming, Wang Jiuqing, Qin Qing, et al. Chinese high energy photon source and the test facility. SCIENCE CHINA Phys, Mech & Astron, 2014, 44: 1075-1094 https://www.cnki.com.cn/Article/CJFDTOTAL-JGXK201410009.htm
[3]	Zhong Z, Kao C C, Siddons D P, et al. Sagittal focusing of high-energy synchrotron X-rays with asymmetric Laue crystals. I. Theoretical considerations[J]. Journal of Applied Crystallography, 2001, 34(4): 504-509. doi: 10.1107/S0021889801006409
[4]	Zhong Z, Kao C C, Siddons D P, et al. Sagittal focusing of high-energy synchrotron X-rays with asymmetric Laue crystals. Ⅱ. Experimental studies[J]. Journal of Applied Crystallography, 2001, 34(5): 646-653. doi: 10.1107/S0021889801010627
[5]	Shi X, Ghose S, Zhong Z, et al. Surface curvatures and diffraction profiles of sagittally bent Laue crystals[J]. Journal of Applied Crystallography, 2011, 44(4): 7.
[6]	Thomasset M, Moreno T, Capitanio B, et al. In-situ metrology for the optimization of bent crystals used in hard-X-ray monochromators: Comparison between measurement and simulation[J]. Nuclear Inst & Methods in Physics Research A, 2010, 616(2): 197-202.
[7]	Ferrer J L. Correction for the twist and the conical defects of a sagittaly bent crystal[J]. Nuclear Instruments & Methods in Physics Research, 1999, 431(1-2): 224-233.
[8]	Chernikov R, Klementiev K. Recent progress of the XRT: Ray tracing and wave propagation toolkit (Conference Presentation)[C]//Advances in Computational Methods for X-ray Optics IV. 2017.
[9]	Shi X, Ghose S, Dooryhee E. Performance calculations of the X-ray powder diffraction beamline at NSLS-Ⅱ[J]. Journal of Synchrotron Radiation, 2013, 20(2): 234-242. doi: 10.1107/S0909049512049175
[10]	Koseki Y, Tanikawa T, Koyachi N, et al. Kinematic analysis of a translational 3-d. o. f. micro-parallel mechanism using the matrix method[J]. Advanced Robotics, 2002, 16(3): 251-264. doi: 10.1163/156855302760121927
[11]	单云霄, 陈长征, 刘磊, 等. 柔性铰链的有限元法设计与分析[J]. 中国光学, 2010, 3(2): 146-151. https://www.cnki.com.cn/Article/CJFDTOTAL-ZGGA201002007.htm Shan Yunxiao, Chen Changzheng, Liu Lei, et al. Design and analysis of flexure hinge by finite element method. Chinese Optics, 2010, 3(2): 146-151 https://www.cnki.com.cn/Article/CJFDTOTAL-ZGGA201002007.htm
[12]	Kim J H, Kim S H, Kwak Y K. Development and optimization of 3-D bridge-type hinge mechanisms[J]. Sens Actuator A Phys. 2004, 116: 530-538. doi: 10.1016/j.sna.2004.05.027
[13]	闫凯, 张静, 寇子明. S形折叠式柔性铰链结构设计[J]. 中国机械工程, 2017, 28(14): 1696-1700. https://www.cnki.com.cn/Article/CJFDTOTAL-ZGJX201714011.htm Yan Kai, Zhang Jing, Kou Ziming. Structure design of S-type foldable flexible Hinges. China Mechanical Engineering, 2017, 28(14): 1696-1700 https://www.cnki.com.cn/Article/CJFDTOTAL-ZGJX201714011.htm
[14]	Freund A K, Comin F, Hazemann J L, et al. Performances of various types of benders for sagittally focusing crystals on ESRF synchrotron beamlines[C]//Proc of SPIE. 1998, 3448: 144-145.