Amplification and beam combination of ultra-short KrF laser pulse
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摘要: 为充分利用氟化氪（KrF）准分子激光放大器的长泵浦时间，探索提高激光输出效率的方法，开展紫外超短脉冲在KrF准分子激光器中多脉冲放大和组束的实验研究。采用双脉冲放大方案研究激光脉冲时间间隔对输出能量的影响，确定延时时间，提高脉冲总能量并有效抑制自发辐射（ASE）。实现了单次放大4个紫外超短脉冲，获得了近4倍于单脉冲放大的输出能量。并探索紫外超短激光脉冲的组束技术，成功应用光学角多路的方法将两个亚皮秒的紫外激光脉冲进行精确组束。Abstract: To make full use of the long pump time of krypton fluoride excimer laser amplifiers and to increase the amplification efficiency, we carried out experimental research on multi-pulse amplification and beam combination of ultra-short UV pulses. The effect of delay time on pulse energy was studied using dual pulse amplification. Based on the above relationship, optimal delay time was confirmed, the increase of total energy and the reduction of amplified spontaneous emission (ASE) were both archived. Amplification of four ultraviolet pulses was achieved, and the energy was nearly four times that of the single pulse amplification. We also explored beam combining technology of ultraviolet ultra-short laser pulses, and combined two sub-picosecond pulses accurately.
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Key words:
- ultraviolet short pulse laser /
- excimer laser /
- KrF laser /
- beam amplification /
- beam combination
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图 2 延迟时间对总输出能量的影响
Figure 2. Energy ratio between dual pulses and single pulse vs delay time
表 1 脉冲能量
Table 1. Pulse energy
pulse No. input energy/μJ output energy/mJ 1 70±10 40±5 2 55±10 50±5 3 62±10 40±5 4 61±10 50±5 
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1. 景辉辉，王静宜. 光电测量技术的光学元件表面缺陷自动识别. 激光杂志. 2020(09): 206-210 . 
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