Investigation of high voltage pulse generators with Marx generators in parallel
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摘要:
脉冲功率技术在工业和生物医学领域有着广泛的应用，很多应用场合要求输出数百安培的高压脉冲。固态Marx发生器虽已研究多年，但是被广泛采用直插封装的IGBT和MOSFET功率半导体开关管的额定电流通常都低于100 A，无法满足低阻抗负载的应用需求。为提高输出脉冲电流幅值，提出两种多路Marx发生器并联的脉冲电源的拓扑结构，第一种方案采用多路Marx发生器直接并联，第二种是共用一组充电开关管的多路Marx发生器并联。由FPGA提供充放电控制信号，采用串芯磁环隔离驱动方案实现带负压偏置的同步驱动，主电路选用开通速度快、通流能力强的IGBT为主开关的半桥式固态方波Marx电路。实验结果表明，6路16级Marx直接并联的脉冲发生器能输出重频100 Hz高压方波脉冲幅值可达10 kV，在30 Ω负载侧输出峰值电流可达300 A，上升时间230 ns。共用充电开关管的6路4级Marx并联发生器在5 Ω电阻负载上的输出电流峰值可达300 A，最大输出电流可达460 A，上升时间272 ns。表明多路Marx发生器并联可以有效地减小系统内阻，提高系统带载能力；改进后的并联方案实现大电流脉冲输出的同时，所采用的开关管数量减小近一半，提高了系统的抗干扰能力的同时，降低了脉冲电源的成本；且增加级间并联导线可进一步改善均流效果。
Abstract:Pulsed power technology has been widely used in industrial and biomedical applications. In many cases, high-voltage pulses with current amplitudes up to hundreds of amperes are required. Although solid-state Marx generators have been studied for a couple of years, the rated current of power semiconductor switches such as IGBT and MOSFET in Direct Insertion Packaging (DIP) is usually much lower than 100 A, which cannot meet the high-current requirements for low-impedance load. Therefore, two topologies of the multiple Marx generators in parallel are proposed to increase the amplitudes of output current. In the first structure, multiple Marx generators are connected in parallel directly. In the second structure, multiple Marx generators sharing a series of charging switches are connected in parallel. An FPGA provides two control signals for charging and discharging. Using many transformers with their primary winding in series, synchronous driving signals with negative bias voltage are realized. And the main circuit adopts the solid-state rectangular Marx circuit based on half-bridge units. Power IGBTs which has fast opening speed and high current capacity are utilized as the main switches. The experimental results show that the pulse generator with six 16-stage Marx generators directly connected in parallel can output high-voltage rectangular pulses with voltage amplitude up to 10 kV and peak current up to 300 A through a 30 Ω resistive load at a repetition frequency of 100 Hz. The peak output current of six 4-stage Marx generators in parallel with shared charging switches can reach 300 A with a rising time of 230 ns, and the maximum output current can reach 460 A with a rising time of 272 ns through a 5 Ω resistive load. The results show that the parallel connection of multiple Marx generators can effectively reduce the internal resistance of the system and improve the current capacity of the system. Moreover, multiple Marx generators in parallel with shared charging switches not only output high-current pulses, but also halve the number of switches while the EMC is also improved. The current balancing can be further improved by inserting the parallel connection between stages.
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Key words:
- pulse generator /
- Marx generators in parallel /
- high current /
- rectangular pulse
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图 1 多路Marx发生器直接并联主电路
Figure 1. Power circuit of many Marx generators connected in parallel directly
图 2 共用充电开关管的多路Marx发生器并联主电路
Figure 2. Power circuit of many Marx generators in parallel sharing charging switches
图 5 阻性负载上总电流仿真波形
Figure 5. Simulating waveform of total current through resistive load
图 6 阻性负载上总电流
Figure 6. Waveform of total current through resistive load (directly parallelled)
图 7 不同Marx支路的输出电流波形
Figure 7. Waveforms of current in various branches (directly parallelled)
图 8 阻性负载上总电流
Figure 8. Waveform of total current through resistive load (sharing charging switches)
图 9 不同Marx支路的输出电流波形
Figure 9. Waveforms of current in various branches (sharing charging switches)
图 10 级级并联后每一路Marx输出电流
Figure 10. Current waveforms in different branches with stage-stage parallel connection
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