全固态双极性纳秒脉冲电源研制及应用

李帅康; 黄邦斗; 章程; 邵涛

doi:10.11884/HPLPB202133.210008

全固态双极性纳秒脉冲电源研制及应用

doi: 10.11884/HPLPB202133.210008

李帅康^{1, 2,},
黄邦斗^1, ,,
章程^{1, 2},
邵涛^{1, 2}

1.
中国科学院电工研究所等离子体科学和能源转化北京市国际科技合作基地，北京 100190
2.
中国科学院大学，北京 100049

基金项目: 国家自然科学基金项目（51925703，51637010，51907190）

详细信息

作者简介:
李帅康（1997—），男，硕士研究生，主要从事气体放电等离子体相关研究

通讯作者:
黄邦斗（1992—），男，博士，助理研究员，主要从事脉冲功率技术、等离子体诊断、反应动理学相关研究

中图分类号: TM832; O539
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- 被引次数: 0
出版历程
- 收稿日期: 2021-01-30
- 修回日期: 2021-05-02
- 网络出版日期: 2021-05-22
- 刊出日期: 2021-06-15

Development and application of all-solid-state bi-polar nanosecond pulse generators

Li Shuaikang^{1, 2
,},
Huang Bangdou^{1
, ,},
Zhang Cheng^{1, 2},
Shao Tao^{1, 2}

1.
Beijing International S & T Cooperation Base for Plasma Science and Energy Conversion, Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China

摘要

摘要: 研制了一种双极性交替的纳秒高压脉冲电源，进行了双极性纳秒脉冲放电产生等离子体研究。该电源先通过固态开关IGBT将直流电压截断成电压脉冲，通过可饱和脉冲变压器拓扑，实现升压并缩短脉冲上升沿。该电源可在一个周期内输出极性相反的2个脉冲，且时序可以灵活控制。通过优化调整器件参数，研制了两种不同输出性能参数的双极性纳秒脉冲电源：①峰值电压10 kV、爆发模式脉冲重复频率500 kHz（正负脉冲间隔2 μs）、连续重复频率1 kHz；②峰值电压25 kV、爆发重频200 kHz、连续重频600 Hz。测试电源的运行性能，发现电源存在温度升高的情况，但长时间（＞0.5 h）运行温度趋于稳定。10 kV电源连续运行在1 kHz时最高温度点50.5 ℃；25 kV电源连续运行在600 Hz时最高温度点60 ℃。利用该电源驱动线板电极阵列和表面介质阻挡放电结构，证实了该电源可以用于常压空气条件下产生大面积等离子体。
- 双极性脉冲电源 /
- 磁压缩 /
- 固态开关 /
- 纳秒脉冲放电 /
- 大气压等离子体
Abstract: A nanosecond pulse generator with alternating output voltage polarity is developed, and the study of plasma generated by bipolar nanosecond pulse discharge is carried out. The generator first cuts DC voltage into a voltage pulse through solid-state switches IGBT, and uses a saturable pulse transformer to boost the voltage and shorten the pulse rising edge. The generator can output two pulses with opposite polarities in one cycle, and the timing can be flexibly controlled. By choosing devices with proper parameters, two bipolar nanosecond pulse generators with optimized output parameters are developed: ① The peak voltage is 10 kV, and the pulse repetition frequency in burst mode is 500 kHz (interval between positive and negative pulses is 2 μs), with continuous repetition frequency of 1 kHz; ② The peak voltage is 25 kV, with 200 kHz burst frequency, and the continuous frequency is 600 Hz. The operating performance of the generators is tested, and it is found that the temperature of the generators tends to increase to a stable point during long-duration(more than half an hour) operation. When the 10 kV generator continuously works at 1 kHz, its highest temperature is 50.5 ℃. For the 25 kV generator continuously working at 600 Hz, the highest temperature point is 60 ℃. The result of using the generators to drive the wire-to-plate electrode and the surface dielectric barrier discharge proves that the generators can be used to generate large-area plasma in atmospheric air.
- bi-polar pulse generator /
- magnetic compression /
- solid-state switch /
- nanosecond pulse discharge /
- atmospheric-pressure plasma

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图 1 双极性纳秒脉冲电源整体框图

Figure 1. Overall block diagram of bipolar nanosecond pulse power supply

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图 2 脉冲产生电路原理图

Figure 2. Schematic diagram of pulse production circuit

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图 3 脉冲充放电能量流通路径

Figure 3. Energy flow path of pulse charging and discharging

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图 4 电容C₃电压波形

Figure 4. Voltage waveform of capacitor C₃

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图 5 双极性脉冲电源实物图

Figure 5. Pictures of bipolar pulse power supply

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图 6 两电源不同输入电压时的输出结果

Figure 6. Output results of two power supplies with different input voltages

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图 7 高频工作波形

Figure 7. High frequency working waveforms

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图 8 爆发模式波形

Figure 8. Burst mode waveforms

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图 9 两电源温升情况

Figure 9. Temperature rise of two power supplies

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图 10 两电源IGBT运行温度

Figure 10. Operating temperature of two power supply IGBTs

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图 11 10 kV电源产生放电等离子体

Figure 11. 10 kV power supply produces discharge plasma

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图 12 10 kV电源带SDBD负载时输出电压电流波形

Figure 12. Output voltage and current waveform of 10 kV power supply with load

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图 13 25 kV电源产生放电等离子体

Figure 13. 25 kV power supply produces discharge plasma

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表 1 器件型号与关键参数

Table 1. Tow device models and their key parameters

parameter	value
parameter	10 kV pulse generator	25 kV pulse generator
magnetic core size/mm	25/40/15	35/60/20
saturation magnetic induction/T	0.54	1.2
square ratio	0.94	0.85
N₁∶N₂	2∶25	2∶42
inductance of primary winding/μH	63/56.9/50.55	67/42.2/35.13
inductance of secondary winding/mH	24.8/9.131/5.421	69.94/28.98/16.94
leakage inductance of primary winding/μH	1/0.5/0.49	25/1.3/1.023
leakage inductance of secondary winding/mH	0.851/0.163/0.516	1.65/0.447/0.314
IGBT	IRGPS60B120KD	2MBI450VH-120-50
Note: inductance values of each parameter are tested under 0.1, 1, 10 kHz.

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表 2 与已有电源参数对比

Table 2. Parameter comparison with previous work

technical route	peak-to-peak voltage/kV	pulse repetition frequency/kHz	rise time/ns	pulse width/ns	reference
Marx generator based on solid-state switches	10	0.1	328	3100	[9]
cascaded superposition	20	10	200	5000	[10]
drift step recovery diode	2.2	1000	1	～3	[12]
linear transformer driver	5	3300	30	～100	[13]
magnetic compression	20	500	50	104	this work
magnetic compression	50	200	90	254	this work

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表 3 放电参数对比（SDBD）

Table 3. Comparison of discharge parameters (Surface Dielectric Barrier Discharge, SDBD)

power source	peak-to-peak voltage/kV	discharge area	references
2 kHz AC	11.9	30.4 mm×10 mm	[23]
35～55 kHz AC	12～21	50 mm×15 mm	[24]
positive pulse	20	70 mm×19 mm	[25]
bipolar pulse	20	81 mm×25 mm	this work

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表 4 放电参数对比

Table 4. Comparison of discharge parameters

power source	electrode geometry	voltage/kV	distance/mm	references
DC power	wire-to-plate	30	20	[26]
DC power	wire-to-plate	22	50	[27]
DC power	wire-to-plate	18	20	[28]
positive pulse	tube-to-plate	31	30	[29]
positive pulse	pin-to-pin	17.5	10	[30]
negative pulse	pin/tube-to-plate	100	40	[31]
bipolar pulse	wire-to-plate	25	60	this work

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