White light spectroscopy technology for measuring the uniformity of capsule shell thickness
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摘要: 为了精密检测靶丸壳层厚度及其分布数据，开展了靶丸壳层厚度及其分布的白光反射光谱测量技术研究。介绍了靶丸壳层的白光反射光谱及其光谱数据处理方法（极值法、峰值拟合法、干涉级次校正法等）的基本原理，搭建了基于白光反射光谱的精密回转轴系测量装置；开展了GDP靶丸壳层厚度及其分布的白光反射光谱测量、数据处理和可靠性验证实验，获得了靶丸壳层厚度圆周分布曲线。结果表明，基于峰值拟合法和干涉级次校正的白光反射光谱技术可实现靶丸壳层厚度及其分布的准确测量，其测量误差小于0.1 μm。Abstract: To measure accurately the thickness and its distribution of capsule, the white light reflection spectrum measurement technology is studied. The basic principle of white light reflection spectrum and the corresponding data processing methods, such as the extreme value method, the peak fitting method and the interference order correction method, are analyzed. Based on the white light reflection spectrum and the precision rotary axis system, the measuring apparatus applied to determine the shell thickness and its distribution of the capsule is developed. The white light reflectance spectrum measurement, data processing and reliability verification experiments of GDP capsule are carried out and the circular thickness distribution curve of capsule is obtained. The research results show that the thickness and its distribution of capsule can be measured accurately by white light reflectance spectrum technology based on spectral peak fitting method and interference order correction method and the measurement error is less than 0.1 μm.
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图 2 靶丸壳层白光反射光谱及局部波段内高斯拟合曲线
Figure 2. White light reflectance spectrum of target shell and Gaussian fitting curve in the local wavelength
图 4 GDP薄膜的白光垂直扫描干涉测量曲线（图中数据应为6182.2nm）
Figure 4. White light vertical scanning interferometry curve of GDP film
表 1 靶丸壳层厚度测量数据
Table 1. Thickness measurement data of target shell
peak wavelength/nm physical thickness d/nm extremum method peak value fitting grade correction method 646.3 7609.9 7525.2 7560.1 663.9 7620.3 7526.6 7558.7 682.4 7594.5 7528.0 7557.0 702.1 7498.7 7529.3 7555.9 723.2 7358.8 7530.7 7557.6 746.1 7513.2 7531.9 7563.9 770.0 7566.4 7533.2 7565.6 
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表 2 GDP膜厚测量数据
Table 2. Thickness measurement data of GDP film
wavelength/nm optical thickness/nm physical thickness/nm 586.9 19 661.2 6132.7 604.8 19 658.4 6131.8 623.5 19 642.1 6126.7 644.1 19 645.8 6127.8 665.6 19 636.9 6125.0 689.0 19 638.7 6125.6 713.7 19 628.3 6122.4
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