Experimental study on online cleanliness of the 400 mm aperture 4×2 combined slab amplifier
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摘要: 在氙灯放电泵浦过程中, 片状放大器片腔内材料在高强度氙灯光辐照下, 存在显著的热解过程, 产生大量的μm级悬浮粒子。针对放大器在线洁净度控制，采取了包括选用有利于洁净控制的材料、消除盲孔与焊缝、深度酸洗刻蚀、高压喷淋清洗和最终的光照清洗等系列有效措施。实验研究结果表明：经过100发次光照清洗，片腔内气溶胶颗粒处于300～1000之间，接近美国国家点火装置(NIF)洁净水平；发次运行完成后，利用约0.4 m/s的氮氧混合气体对放大器腔体进行吹扫，气溶胶颗粒在2 min内可恢复至0值。Abstract: In the discharge pumping process of xenon lamp, there is a significant pyrolysis process of the materials in the cavity of the slab amplifier under the irradiation of high intensity xenon light, which produces a large number of micron sized suspended particles. For the online cleanliness control of the amplifier, a series of effective measures were taken, including the selection of materials conducive to the cleanliness control, elimination of blind holes and welds, deep pickling and etching, high-pressure spray cleaning and final light cleaning. The experimental results show that after 100 times of light cleaning, the aerosol particles in the chamber are between 300 and 1000, which is close to the cleanliness level of the American National Ignition Facility (NIF) Project; After the operation of the generator is completed, the amplifier chamber is purged with a mixture of nitrogen and oxygen of about 0.4 m/s, and the aerosol particles can recover to zero within 2 minutes.
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Key words:
- slab amplifier /
- cleanliness /
- aerosol /
- optical surface damage
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图 1 400 mm口径4×2组合式片状放大器示意图
Figure 1. Schematic diagram of 400 mm aperture 4×2 combined slab amplifier
图 2 气溶胶颗粒数峰值随光照清洗发次变化情况
Figure 2. Change of aerosol particle number’s peak value with light cleaning times
图 3 不同吹扫条件下片腔内0.5 μm颗粒密度变化情况
Figure 3. Variation of 0.5 μm particle density in the cavity under different purging conditions
表 1 真片腔室与假片腔室状态对比
Table 1. Comparison of real slab chamber and false slab chamber
slab cavity status of slab surface cleaning process of slab status of partition glass real slab cavity There are 4 slabs in total, of which 1 is a real one (with edging treatment completed) and 3 are fake ones (without edging treatment). wiping and cleaning the surface of the real slab and ultrasonic cleaning the fake slabs The surface of partition glass is coated with a chemical film that can enhance the transmission of xenon light. fake slab cavity there are 4 fake slabs in total ultrasonic cleaning ordinary glass without chemical film 
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