Areal density measurement technology for metal foils based on X-ray bent crystal imaging
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摘要: 针对靶用高Z金属薄膜的无损检测需求,提出了一种通过超环面弯晶聚焦型X光单能成像器件,实现金属薄膜均匀性及面密度等参数精确标定的测量技术。该技术即通过高通量、高单能性成像,定量获取薄膜X光透过率及其空间分布,有效提升了面密度测量的精度,同时实现了对其均匀性的高空间分辨评估。从总体方案设计、元器件制备和测试实验等方面开展了深入研究,并评估了各种可能因素对测量不确定度的影响。所发展的超环面弯晶成像系统针对20 keV级的高能X射线在mm尺度内实现了优于5 μm的微区分辨,能谱分辨达到几eV。通过泡沫金样品面密度测量实验证明了技术可行性,相对不确定度优于2%。研究结果为激光惯性约束聚变高Z靶材料的精密无损检测提供了一种新的测量技术,并有望应用于其他需要大视场、高空谱分辨成像的需求领域。Abstract: In view of the measurement requirements of uniformity and areal density parameters of target metal foils, a non-destructive testing technology for high-Z metal foils by obtaining thin film X-ray transmittance and its spatial distribution through a toroidal crystal focusing type X-ray monochromatic imaging device is proposed. This technology not only effectively improves the accuracy of areal density measurement by high-throughput and high-monochromatic imaging, but also realizes high spatial resolution evaluation of thin film uniformity. This paper carries out in-depth research from the aspects of overall scheme design, component preparation and test experiment, and evaluates the influence of various possible factors on measurement uncertainty. The developed toroidal crystal imaging system achieves micro-region resolution better than 5 μm within millimeter scale for 20 keV-level high-energy X-rays, and spectral resolution reaches several eV. The feasibility of the developed technology is verified by surface density measurement experiment of foam gold sample, and relative uncertainty of areal density measurement better than 2% is obtained. This paper provides a new measurement technology for precise non-destructive testing of high-Z target materials for laser inertial confinement fusion, which is also expected to be applied to other fields that require large field of view and high spatial spectral resolution imaging.
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Key words:
- metal foil /
- X-ray imaging /
- toroidal crystal /
- high spectral resolution /
- surface density measurement
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表 1 Ge
$\left\langle 511 \right\rangle $ 超环面弯晶系统光学结构参数Table 1. Optical structure parameters of toroidal crystal system for Ge
$\left\langle 511 \right\rangle $ crystal material crystal orientation θ/(°) Rm/mm Rs/mm object distance/mm image distance/mm Ge $\left\langle 511 \right\rangle $ 77.74 300 286.5 171.01 1 026.05 表 2 Ge
$\left\langle 511 \right\rangle $ 测量泡沫金样品面密度Table 2. Ge
$\left\langle 511 \right\rangle $ measurement of surface density of foam gold sampleNo. image coordinates/mm direct light count (I0) transmitted light count (I) transmissivity/% areal density/(mg/cm2) thickness/μm P_1 (409,276) 3 309 600 18.132 15.856 8.207 P_2 (432,274) 3 003 590 19.647 15.108 7.820 P_3 (441,281) 2 871 554 19.296 15.290 7.914 P_4 (415,298) 3 433 609 17.740 16.055 8.310 P_5 (436,297) 3 523 624 17.712 16.072 8.319 P_6 (395,313) 3 450 647 18.754 15.547 8.047 P_7 (427,324) 3 599 613 17.033 16.432 8.505 P_8 (403,326) 3 366 594 17.647 16.107 8.337 -
[1] 唐永建, 张林, 吴卫东, 等. ICF靶材料和靶制备技术研究进展[J]. 强激光与粒子束, 2008, 20(11):1773-1786Tang Yongjian, Zhang Lin, Wu Weidong, et al. Research progress on ICF target materials and target fabrication technology[J]. High Power Laser and Particle Beams, 2008, 20(11): 1773-1786 [2] 高莎莎, 吴小军, 何智兵, 等. 激光惯性约束聚变靶制备技术研究进展[J]. 强激光与粒子束, 2020, 32:032001 doi: 10.11884/HPLPB202032.200039Gao Shasha, Wu Xiaojun, He Zhibing, et al. Research progress of fabrication techniques for laser inertial confinement fusion target[J]. High Power Laser and Particle Beams, 2020, 32: 032001 doi: 10.11884/HPLPB202032.200039 [3] Rong Chunming, He X, Meng J, et al. Nuclear microbeam analysis of ICF target material made by GDP technique[J]. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2015, 348: 178-182. [4] Dong Yalun, Yang Lihong, Jin Ziqi, et al. Experimental and numerical analysis of ballistic impact response of fiber-reinforced composite/metal composite target[J]. Composite Structures, 2022, 294: 115776. doi: 10.1016/j.compstruct.2022.115776 [5] Stoner J O Jr, Borgardt J, Ashbaugh M D, et al. Areal-density measurement of 12C and 13C foils and layers using the (3He, p) nuclear reaction[J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2002, 480(1): 133-136. [6] Fukuchi T, Yamamoto S, Kataoka J, et al. Beta-ray imaging system with γ-ray coincidence for multiple-tracer imaging[J]. Medical Physics, 2020, 47(2): 587-596. doi: 10.1002/mp.13947 [7] Ashworth C. Boosting β-ray detection[J]. Nature Reviews Materials, 2020, 5: 640. doi: 10.1038/s41578-020-0231-z [8] Yi Shengzhen, Si Haoxuan, Jiang Li, et al. Optical and multilayer design of two-energy sixteen-channel Kirkpatrick-Baez microscope for ultrafast plasma diagnostics[C]//Proceedings of SPIE 11909, Tenth International Symposium on Ultrafast Phenomena and Terahertz Waves. 2021: 11909S. [9] 伊圣振, 司昊轩, 黄秋实, 等. 激光惯性约束聚变X射线诊断用多通道Kirkpatrick-Baez成像系统研究进展[J]. 光学学报, 2022, 42:1134007Yi Shengzhen, Si Haoxuan, Huang Qiushi, et al. Research progress of multi-channel Kirkpatrick-Baez microscope for X-ray diagnostics in laser inertial confinement fusion[J]. Acta Optica Sinica, 2022, 42: 1134007 [10] Yi Shengzhen, Si Haoxuan, Fang Ke, et al. High-resolution dual-energy sixteen-channel Kirkpatrick-Baez microscope for ultrafast laser plasma diagnostics[J]. Journal of the Optical Society of America B, 2022, 39(3): A61-A67. doi: 10.1364/JOSAB.444438 [11] Si Haoxuan, Dong Jiaqin, Fang Zhiheng, et al. High-resolution X-ray monochromatic imaging for laser plasma diagnostics based on toroidal crystal[J]. Plasma Science and Technology, 2023, 25: 015601. [12] Mamouei M, Budidha K, Baishya N, et al. An empirical investigation of deviations from the Beer-Lambert law in optical estimation of lactate[J]. Scientific Reports, 2021, 11: 13734. doi: 10.1038/s41598-021-92850-4 [13] Linstrom P J, Mallard W G. NIST chemistry WebBook[D/OL]. Gaithersburg: National Institute of Standards and Technology, 2020[2023-04-07]. https://webbook.nist.gov/chemistry/. [14] Jiang Chenglong, Xu Jie, Mu Baozhong, et al. Four-channel toroidal crystal X-ray imager for laser-produced plasmas[J]. Optics Express, 2021, 29(4): 6133-6146. doi: 10.1364/OE.415537 [15] 姚童, 黎淼, 施军, 等. 钛靶X射线超环面晶体衍射高分辨率聚焦诊断技术研究[J]. 中国激光, 2021, 48:2103002 doi: 10.3788/CJL202148.2103002Yao Tong, Li Miao, Shi Jun, et al. High-resolution focusing diagnosis technology on Ti-target X-ray diffraction using toroidal crystals[J]. Chinese Journal of Lasers, 2021, 48: 2103002 doi: 10.3788/CJL202148.2103002 [16] Schollmeier M S, Loisel G P. Systematic search for spherical crystal X-ray microscopes matching 1-25 keV spectral line sources[J]. Review of Scientific Instruments, 2016, 87: 123511. doi: 10.1063/1.4972248 [17] Klementiev K, Chernikov R. Powerful scriptable ray tracing package XRT[C]//Proceedings of SPIE 9209, Advances in Computational Methods for X-Ray Optics III. 2014: 92090A. [18] JJF 1059.1-2012, 测量不确定度评定与表示[SJJF1059.1-2012, Evaluation and expression of uncertaintv in measurement[S