微透镜变化对半导体激光器光束匀化效果的影响

殷智勇; 汪岳峰; 尹韶云; 杜春雷; 贾文武; 王军阵; 白慧君

doi:10.3788/HPLPB20132510.2556

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微透镜变化对半导体激光器光束匀化效果的影响

doi: 10.3788/HPLPB20132510.2556

1.
军械工程学院电子与光学工程系, 石家庄 050003;
2.
中国科学院重庆绿色智能技术研究院, 微纳制造与系统集成中心, 重庆 401 1 22;
3.
中国华阴兵器试验中心, 陕西华阴 71 4200

详细信息

通讯作者:
殷智勇

计量
- 文章访问数: 1601
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- 被引次数: 0
出版历程
- 收稿日期: 2013-03-21
- 修回日期: 2013-06-26
- 刊出日期: 2013-09-22

Impact of microlens changes on the homogenization effect of semiconductor laser beam

1.
Department of Electronic and Optical Engineering,Ordnance Engineering College,Shijiazhuang 050003,China;
2.
Micro-nano Manufacturing and System Integration Center,Chongqing Institute of Green and Intelligent Technology,Chinese Academy of Sciences,Chongqing 401122,China;
3.
Ordnance Test Center,Huayin 714200,China

摘要

摘要: 为了实现高均匀性的半导体激光器泵浦光源，研究了成像型光束积分器中微透镜的变化对泵浦光均匀性的影响。详细讨论了微透镜数值孔径与入射光束的角度匹配的问题。推导了高斯光束经成像型光束积分器的光场分布模型，分析了微透镜的边缘衍射对光斑均匀性的影响，明确了微透镜孔径大小的取值范围，并利用ZEMAX进行了系统仿真及实验验证。结果表明，经优化后的成像型光束积分器实现了不均匀性为8.11%的矩形光斑。
- 半导体激光器 /
- 光束整形 /
- 边缘衍射 /
- 微透镜阵列 /
- 成像型光束积分器
Abstract: In order to achieve high-homogeneity pumping source of semiconductor laser, the influence of microlens changes in the imaging beam integrator on the homogeneity of pumping light is researched. The relation between microlens numerical aperture and the divergence angle of the incident beam is discussed in detail. The far field distribution model of the Gaussian beam passing through the imaging beam integrator is established, in order to analyze the impact of the diffraction of microlens edge on the spot homogeneity. The upper and lower limits of clear aperture of microlens are confirmed to provide a range value for the optical design of the imaging beam integrator. Finally, the software simulation results with ZEMAX and experimental result are compared, showing that the spot of inhomogeneity 8.11% is achieved by the optimized imaging beam integrator.
- semiconductor laser /
- beam shaping /
- edge diffraction /
- microlens array /
- imaging beam integrator