Development of 0.14 THz high-power pulse detector with overmoded structure
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摘要: 基于n型硅在强电场下的热电子效应,初步研制了一种采用过模结构的0.14 THz高功率太赫兹脉冲探测器。该探测器由基模波导WR6、过渡波导、过模波导WR10, n型硅探测芯片和偏置恒流源组成。模拟分析了探测器的工作过程,给出了相对灵敏度表达式,结果表明过模探测器能很好地工作在TE10模式。合理设计了探测芯片的结构参数和加工工艺,完成了探测芯片的加工和探测器样机的制作。将探测器样机在0.14 THz相对论表面波振荡器的辐射场进行了初步的验证性实验,并与二极管检波器的测量结果进行了对比分析。结果表明:过模探测器样机的响应时间在ps量级,相对灵敏度约为0.12 kW-1,最大承受功率至少为数十W,可用于0.14 THz高功率脉冲的直接探测。Abstract: Based on the hot electron effect of n-Si irradiated by high electric field, a 0.14 THz high-power terahertz pulse detector using overmoded structure is proposed and fabricated. The detector consists of a fundamental mode wavguide WR6, a tapered waveguide, an overmoded waveguide WR10, a detecting chip made of n-Si, and a bias constant current source. First, the working process of the detector is analyzed, showing that the detector can be operated in the TE10 mode well, and the expression of its relative sensitivity is given. Then, the structural parameters and manufacture techniques of detecting chip are reasonably designed, and the fabrication of detecting chips and detector prototypes is accomplished. Ultimately, the validation experiments of the detector prototype are carried out in the radiation field of the 0.14 THz relativistic surface wave oscillator, which are analyzed and compared with the measured results of diode detector. The experimental results show that, the overmoded detector prototype has a response time of picoseconds-level, the relative sensitivity of about 0.12 kW-1, and the maximum enduring power of tens of watts. Therefore, the sensor could be used to directly detect 0.14 THz high-power pulses.
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Key words:
- high-power terahertz pulse /
- overmoded /
- detector /
- hot electron
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