Abstract: The paper summarizes the recent progress of advanced manufacturing technology for the high power laser system in China. The ultra-precision manufacturing technologies, such as ultra-precision grinding, single point diamond fly-cutting and rapid polishing, have been developed for aspheric lens and KDP crystal flats. The preliminary results show the advantages in achieving high accuracy and the ability of yield. Several deterministic finishing technologies have been studied to meet the critical wavefront specifications. A novel removing-mitigating process has been applied to polishing fused silica components to reduce the subsurface defects.