Method of online cleanliness control for upward-facing transport mirrors in integration test bed
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摘要: 针对大口径高通量实验平台面朝上反射镜表面发生的颗粒污染物沉积和损伤现象，提出了一种基于在线监测系统的在线洁净控制方法。通过搭建风刀系统实现了反射镜表面颗粒污染物在线有效洁净处理，利用风帘实现了反射镜表面颗粒污染物在线有效洁净维持，采用图像处理系统快速地实现了在线洁净处理效果的准确评估。实验结果表明，采用风刀吹扫能够减少元件表面颗粒污染物，使用风帘可以有效阻滞颗粒污染物沉降，可应用于反射镜在线洁净维持。
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关键词:
- 大口径高通量实验平台 /
- 在线洁净控制 /
- 风刀 /
- 风帘
Abstract: An online cleanliness control method based on the online monitoring system was developed for controlling the particle pollution and damage of upward-facing transport mirrors in the integration test bed. By building up gas knife system, the online cleanliness processing was effectively achieved for the particle pollution on the mirror surface. By using the gas screen, the cleanliness of the mirror surface was effectively online maintained. The image processing system was applied to assessing the effect of online cleanliness processing. The experimental results indicate that the particle pollution was reduced by the gas knife and the gas screen was useful to avoid the settlement of particle pollution.-
Key words:
- integration test bed /
- online cleanliness control /
- gas knife /
- gas screen
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