用于ICF激光驱动器的谐波分离器制作误差宽容度研究
Study on Tolerance of Fabrication Errors for Color Separation Gratings Applied in ICF
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摘要: 基于标量衍射理论，在傅立叶光学基础上，推导出了谐波分离器衍射效率与其结构参量的关系式；系统地分析了制作误差对衍射效率的影响并进行了计算机模拟研究。Abstract: Based on Fourier Optics，an analytic expression of diffraction efficiency is deduced from the scale diffraction theory. Moreover， the diffraction efficiency of CSG corresponding to fabrication errors is analyzed systematically and simulated using computer. The results of simulation provide theoretical instructions for practical fabrications.
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Key words:
- binary optical element /
- depth error /
- alignment error /
- computer simulation
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