大尺寸硅镜超光滑表面加工的面型控制
Super smooth surface figure control for large single crystal silicon mirror
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摘要: 使用机械-化学抛光法加工大尺寸单晶硅可获超光滑表面，但很难保证良好的面型。提出通过采用开圆孔并连续注入抛光剂的方法来避免抛光盘中心蜂窝眼的出现，可以保证得到良好的面型。最后实验达到较好的面型精度，PV值0.268λ，rms值0.065λ。Abstract: In Chemical-Mechanical polishing experiments we produced optical quality super smooth surfaces on singlecrystal silicon, but cannot insure the surface figure. In order to avoid the alveoli and achieve a good optical surface, a continuously adding slurry method with digging four welldistributed holes was used and advanced in this article. The best results were obtained as 0.268λ peak to peak surface (its diameter 152.4mm) and rms 0.065λ using this method.
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Key words:
- surface figure /
- supersmooth /
- single crystal silicon /
- roughness /
- chemicalmechanical polishing
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