聚乙二醇对溶胶-凝胶SiO2增透膜激光损伤行为的影响
Effect of PEG on laser damage of sol-gel SiO2 anti-reflective coating
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摘要: 采用溶胶-凝胶工艺制备了聚乙二醇（PEG）改性SiO2单层增透膜，用输出波长1.06 μm，脉宽3 ns的调Q激光系统产生的强激光进行辐照实验。观察了添加PEG前后的膜层的微结构、表面形貌以及激光损伤行为的变化，讨论了PEG对薄膜激光损伤行为产生影响的机制。结果表明：添加的PEG可以修饰、导向溶胶簇团的生长和交联，并使之有序，由此制备的薄膜结构规整，微缺陷减少，这就提高了膜层的激光损伤阈值；在激光辐照过程中，膜料吸收激光能量，膜层温度升高，膜层的PEG分子受热逐步分解挥发，膜层产生损伤。Abstract: In this paper, sol-gel single-layer SiO2 anti-reflective coatings modified with PEG were deposited on K9 glass by sol-gel dipping-coating method. The coatings were irradiated by a Q-switched Nd:YAG high power laser whose wavelength was 1 064 nm and pulse width was 3 ns. The microstructure of sol was observed by TEM and the surface morphologies of the coatings were observed by AFM before they were irradiated. The morphologies of the damaged coatings were observed by microscope. Damage mechanics of the laser were studied. The results show that PEG can modify the microstructure of SiO2 coating and thus the induced damage threshold of coating was distinctly improved.
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Key words:
- sol-gel /
- ar coating /
- laser damage threshold /
- laser damage morphology
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