X光多层膜反射镜的损伤与破坏实验研究
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摘要: 产生X光激光的等离子体环境对X光多层膜反射镜造成损伤与破坏。通过模拟实验,给出国产Mo/Si多层膜反射镜的破坏阈值大约是0.10J/cm2,在这个辐照剂量下,多层膜表面均方粗糙度明显增加,反射率几乎降至为零。提出了防止多层膜反射镜破坏的一些想法。Abstract: The plasma environment which creates Xray laser brings the difficulty to the application of Xray multilayer reflector .The most difficult is that the Xray emitted by the plasma destroys and damages the multilayer reflector. It is shown by the simulated test that the damage d threshold of Mo/Si multilayer reflector made in china is less than 0.10J/cm 2. With the exposure the radiation dose the roodmean square roughness of multilayer apparently increases and the reflectivity almost drops to zero. Accor ding to these results,the article state some ideas for preventing damages of the multilayer reflector.
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