类Ni稀土X光激光波段衰减膜的设计与研究
-
摘要: 对类Ni稀土X光激光波段衰减膜进行了设计，并根据设计结果，利用磁控溅射和旋转涂覆法分别制备了自支撑的Ag衰减膜和聚苯乙烯(C8H8)衰减膜。利用真空α能谱测厚仪和α-step100台阶仪分别对衰减膜的质量厚度和均匀性进行了测量，用Auger电子能谱(A ES)对Ag衰减膜进行了表面杂质分析。
-
关键词:
- Ag衰减膜 /
- 聚苯乙烯衰减膜 /
- 真空α能谱测厚仪 /
- 俄歇电子能谱(AES)
Abstract: The design of attenuation foils for the waveband of Ni like r are earth Xray Laser is described. According to the results of the design, the selfsupport silver and polystyrene(C8H8) attenuation foils are made by magnetron spu ttering and spincoating respectively.The mass thickness of the foils and their thickness homogeneity are measured by an α energy spectrum mass thickness apparatus and an αstep100 thickness measurement a pparatus respectively. The surface impurities of silver attenuation foil are analyzed using Auger Elect ron Spectroscope． -
点击查看大图
计量
- 文章访问数: 2298
- HTML全文浏览量: 210
- PDF下载量: 594
- 被引次数: 0
下载:
