Abstract: Phase distribution of the Binary Optical Element(BOE) with good geometrical structure is obtained by a kind of hybrid algorithm.A continuous phase plate with diameter 100mm is m anufactured by ionetching technique with hollowedout mask on the K9glass substrate. The tolerance of the BOE to the phase distortion with Gauss distribution of the input laser beam and the manufa cturing error are analyzed. The intensity distributi on of the focal spot is measured by a general CCD and a series of attenuators with which the measurement dynamic range is increased. The experimental results after data processing show that the focal s pot with sharp edge, low sidelobes and a certain uniformity is obtained and the center zerothorder pulse is suppressed.