高折射率光学薄膜的化学法制备研究
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摘要: 报道了一种以ZrOC12·8H2O为源,溶胶-凝胶法制备高激光负载高折射率薄膜的新方法。薄膜采用旋转镀膜法制备,对薄膜的结构、光学特性及激光损伤阈值进行了测量,有机粘接剂对薄膜折射率及机械强度的影响也作了探讨。以该薄膜与SiO2溶胶凝胶膜交替涂覆制成的多层高反膜,剩余透过率仅0.98%,激光损伤阈值达16J/cm2(3ns)。Abstract: Optic thin film with high refractive index and high laser damage threshold was prepared from ZrOCl2·8H2O with solgel process. The film was prepared with spin coating method. The structure, optical properties and laser damage threshold of the films were investigated. The influences of organic binder to the refractive index and the mechanic strength of the films were also studied. A minimum transmittance of less than 1% near 1064nm was obtained from the present [SiO2/ZrO2]10multilayer HR coatings, meanwhile a laser damage threshold of more than 16J/cm2 was achieved using high power laser at wavelength of 1064nm and pulse width of 2.5ns.
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Key words:
- hydrothermal synthesis /
- sol /
- high refractive index /
- film
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