电子回旋共振微波等离子体技术及应用
Technology and application of electron cyclotron resonance microwave plasmas
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摘要: 电子回旋共振微波等离子体技术(ECR-MP)在表面处理、等离子体刻蚀和薄膜制备，尤其是高品质的激光惯性约束聚变薄膜靶的制备中有着重要的应用。综述了ECR-MP的基本原理、反应装置、实验研究、理论研究和应用情况的发展现状，同时分析了其今后可能的发展趋势。Abstract: In this paper, the basic concepts, reaction equipment, experimental research, theoretical research and present applications of electron cyclotron resonance microwave plasma(ECRMP) are reviewed. At the same time, its development in the future is also discussed.
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