Abstract: Partial coherence source is a key part in the laser system using echelon-free introduced spatial incoherence beam smoothing technique. Different kinds of partial coherence sources have been studied experimentally for improving the uniformity of laser intensity distribution. It is found that the source produced by excimer laser scattering on the surface of a teflon plate is ideal. The properties of this kind of source are studied. As a result, the uniformity of source beam intensity distribution, the beam spatial coherence and energy transfer efficiency of the source are obtained.