脉冲准分子激光淀积薄膜的实验研究
Study on pulsed excimer laser deposited films
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摘要: 利用两种脉宽(30ns，500fs)的KrF准分子激光展开了淀积类金刚石薄膜的实验研究，并且成功地制备了大面积不含氢成分的HF-DLC薄膜，运用时空分辨的等离子体发射光谱诊断系统和离子探针系统研究了等离子体特性对薄膜性能的影响。尝试了利用准分子激光制备非晶硅薄膜，研究了实验参数对非晶硅薄膜制备的影响，并分析了制备具有良好电学和光学性能的非晶硅薄膜的条件。Abstract: Pulsed lasers of two different durations (30 ns, 500 fs) are used to deposit Hydrogenfree Diamond Like Carbon (DLC) films over large areas. Analysis of DLC films shows remarkable mechanical, optical, electrical, and chemical properties that are close to those of diamond. By optical emission spectroscopy and ion probe, the effects of plasma characteristic on DLC film are on experimentally studied. Amorphous silicon films deposited by PLD are also experimentally studied．
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Key words:
- pulse laser deposition /
- dlc film /
- amorphous film
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