潘宁放电在密封电真空器件真空度测量中的应用
Application of Penning discharge in vacuum-measuring of sealed vacuum device
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摘要: 密封电真空器件的可靠性尤其重要，而影响其可靠性的主要因素是真空度。对于具有两个电极的密封电真空器件由于无法利用其自身的电极结构直接测定其真空度，因此需要研究并建立一种合适的真空度测量方法。分析了利用潘宁放电来测量两个电极的密封电真空器件真空度的工作原理，设计了测试实验装置，初步建立了密封电真空器件的潘宁放电模型，给出了有关实验数据。Abstract: Reliability of the sealed vacuum device is very important, and the main reason that affects reliability is its vacuum. As the degree of vacuum cannot be measured directly, an indirectly method is adopted in this paper. In this paper, the principle in measuring the vacuum of sealed vacuum device with Penning discharge is analyzed, the Penning discharge model of sealed vacuum device is established, the experimental device is designed, and pressure-ion current chart is presented.
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Key words:
- penning discharge /
- sealed vacuum device /
- vacuum
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