强激光光学元件表面轮廓功率谱密度函数及其估计
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摘要: 本文在扼要描述了光学元件表面轮廓测量中功率谱密度（PSD）函数的基本概念、公式和应用基础上，重点讨论了光学元件表面低频和中高频空间频率PSD对光场分布的影响，并给出了强激光光学元件表面PSD函数曲线的几个实测结果和分析。Abstract: This paper describes the conception and the applications of the power spectral density function in optical surface profile measurement. It includes power spectral density (PSD standard in ISO10110-8 and its origin, the connection between the light intensity disturbing and PSD function from the surface figure and surface finish. At last the PSD function of the high power laser optical elements is discussed.
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Key words:
- power spectral density function /
- surface profile measure
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