Al/Cu阻抗匹配状态方程测试靶制备工艺研究
Fabrication technology of Al/Cu impedance match EOS measurement target
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摘要: 采用轧制技术和真空扩散连接技术,成功实现了Al/Cu阻抗匹配状态方程测试靶的制备,通过原子力显微镜(AFM)、扫描电镜(SEM)、X射线衍射(XRD)、台阶仪等测试方法,对样品结构及表面质量进行分析。结果表明:通过轧制技术制备的金属薄膜表面质量较好,表面粗糙度小于25 nm;扩散连接铝铜薄膜界面结合良好,为连续连接,扩散界面控制在150 nm以内。Abstract: The fabrication process of Al/Cu impedance-match EOS measurement target was discussed. With the rolling and diffusion-bonding technologies, the Al/Cu impedance-match EOS measurement target was successfully fabricated. The structure and surface roughness of the target were analyzed by AFM, SEM, XRD, and alpha-step 500 device. The surface roughness of the target is smaller than 25 nm. And the Al/Cu diffusion interface zone is narrower than 150 nm.
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Key words:
- impedance match /
- equation of state (eos) /
- target /
- aluminum /
- copper /
- film
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