Abstract: The aim of this research subject is to develop a precise time relationship logic for MOPA system, starting manner for every devices and some hard wires of the control system. Coaxial single turn magnetic switch and pulse high voltage transformer can produce 150kV pulse high voltage with less than 200ns in rise time. The Marx generators in preamplifier and main amplifier of MOPA system are trigged with this type of high voltages, the jitters of voltage developing time are less than 13ns and 23ns respectively, when the gas spark gaps in Marx are charged to 90% of their self breakdown voltage. When the main gas switches in accelerators are trigged by KrF laser the jitter time less than 10ns is achieved for whole pumping power system.