超高阈值Pick-off反射镜的研制
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摘要: 采用水中抛光技术抛制了90mm×60mm×10 mm的K9玻璃基片，表面粗糙度达1nm。在APS1504镀膜机上，摸索了电子束蒸发镀膜的最佳工艺条件，较稳定地在该超光滑玻璃表面上镀制了对波长1054 nm、入射角45°、反射率R≥99.5%的反射膜。膜层的抗激光损伤阈值可达26 J/cm2(1054nm, 1ns)，镀膜后该玻璃基片反射波前可达l /10(p-v)，最终制备了超高阈值Pick-off反射镜。
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关键词:
- 激光损伤阈值 /
- 反射波前 /
- Pick-off反射镜 /
- 电子束蒸发 /
- 水中抛光
Abstract: The surface of K9 glass substrate (with size 90mm×60mm×10mm) was polished by bowl-feed polish. The super smooth surface with roughness less than 1nm and reflective wavefront l /20(p-v) (l =632.8nm ) was got. The high reflective thin film, whose reflectivity is more than 99.5% at wavelength 1054nm for incidence angle 45°, and whose laser induced damage threshold is 26J/cm2 (1054nm, 1ns), was coated on this super smooth surface by electron beam evaporation deposition in the APS1504 coating machine. After alternately coating HfO2 and SiO2 multilayer on the surface, this mirror’s reflective wavefront is l /10(p-v) (l =632.8nm ). The high quality pick-off mirror whose specification is agreement with the designed specification of that type of mirror for the SHEN GUANG Ⅲ was got. -
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