1.06μm波段大口径无规位相板制作与性能测试
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摘要: 利用大面积光刻和腐蚀等工艺，研制成功了一块用于激光直接驱动约束聚变装置的1.06μm波段、口径为Φ 50μm的无规位相板。台阶几何深度实测值与理论值的相对偏差为1.24% ，该位相板可获得边缘陡直、近似平顶的焦斑光强分布。表明所采用的工艺可适用于大口径无规位相板的制作。Abstract: A large aperture random phase plate (RPP) for target-plane laser beam smoothing at 1.06m m wavelength was fabricated, by using large aperture exposure and dilute HF etching processes. The RPP’s clear aperture is f 250mm. The measured average step height is 1.060m m at 5 locations on the RPP, which has a relative deviation of 1.24% to the theoretical value. A focal spot with very sharp edges and nearly flat-top overall envelop intensity distribution was obtained at the focal-plane of a focusing lens. These results show the fabrication techniques for RPP is effective, and is easily scalable to even larger apertures.
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