61单元分立式压电变形反射镜的研制
The Development of 61 Element Discrete Piezoelectric Deformable Mirror
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摘要: 由于61单元自适应光学系统(AO)对分立式压电变形反射镜单元数(61单元)和变形量的要求超过以往研制的变形镜,从理论分析到工艺研究采取措施,研制成功了用于系统实验的变形镜,顺利地完成了AO与跟瞄系统(ATP)的对接,提高了ATP的跟瞄精度。Abstract: The 61 element discrete piezoelectric deformable mirror(DM61) is used to correct wavefront errors.A lot of difficulties are appeared in our development works because the demads of DM61 now are more than that of the mirror,developed before such as element number(61) and deformation (±３μm）.Methods are adopted from theory analysis and technics investigation to make the DM61 be used in the connection of AOS and ATP to enhance the trace accuracy successfully.
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Key words:
- deformable mirror /
- adaptive optics /
- technics investigation
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