激光等离子体软X射线源靶材的选择及特性
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摘要: 给出了用于软X射线投影光刻的激光等离子体源靶材的选择依据。计算了类锂氧离子的辐射跃迁波长和相应的跃迁速率值。并通过与常规金属靶的比较, 给出了实验靶的一些特性。Abstract: Choice criteria on target material for soft Xray projection lithography source were proposed in this paper. Spectral data of Lilike oxygen ion were given based on this criteria. The characteristics of new plasma target were given compared with conventional metal targets .
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Key words:
- laserplasma /
- target material /
- debris
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