300mm×300mm口径电光开关等离子体电极实验研究
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摘要: 设计并实验了300mm×300mm口径的辉光放电室，利用钮扣阴极和自动预电离条形阴极进行实验，获得了大面积均匀的辉光放电。测量了不同状态下辉光放电的放电延时及等离子电阻。得到了产生大面积均匀辉光放电的最佳条件。Abstract: We have constructed and tested a glow discharge chamber with a clear aperture of 300mm 300mm . By using the 揵uttons?cathode and the automatic preionization cathode, we have got uniform glow discharge in large area. We have measured delay time of the glow discharge and the plasma resistance under various conditions. So the optimal conditions forming uniform glow discharge in large area were discovered.
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Key words:
- glow discharge /
- plasma electrode /
- electro-optical switch
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