短波长化学激光系统反射镜研制
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摘要: 报道了短波长化学激光系统高反射镜的膜系设计、镀膜材料的选取、反射膜制备技术、基板加工、反射镜性能测试和各种膜系反射镜在强激光辐照下的热畸变和损伤。Abstract: The thin film design, the coating materials selection, the production technology for reflect coatings, substrate fabrication, optical performatance measuring, and the damage and heat deformation of reflectors subjected to the high power have been reported to the short wavelength chemical laser system high reflector in the this paper.
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Key words:
- coil laser /
- reflect coatings /
- laser damage /
- heat defomation
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