大电流密度碳纳米管场致发射阴极阵列的研制
Fabrication of large current density carbon nanotube based field emitters
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摘要: 设计了一种由TiN，Al，Fe和牺牲层构成的堆栈式催化剂层结构，采用微波等离子体化学气相沉积法实现碳纳米管阵列高速笔直生长。SEM和TEM结果表明，生长出来的碳纳米管为典型的多壁碳纳米管，长度和直径均匀，排列整齐并垂直于基底，生长速率大于5 μm/min，晶格缺陷少。场致发射测试结果表明：碳纳米管的发射阵列具有良好的电流发射稳定性，最大电流密度大于6 A/cm2。紫外光电子能谱法（UPS）测试出碳纳米管的功函数为4.59 eV，则相应的场致发射陈列的场增强因子大于1 400。Abstract: A synthesis of carbon nanotubes(CNT) for field emission was grown speedly and vertically by microwave plasma chemical vapor deposition with a multi-layered stack as the catalyst lay. The SEM and TEM analysis results of the CNT samples showed that as-grown CNT were typical multi-layered ones with few defects, aligned and straight, and uniform in diameter and length. The growth rate of CNT was more than 5 μm/min. The field emission results showed that the as-grown CNT emission array presented excellent and stable field emission with current density more than 6 A/cm2. The work function of the as-grown CNT was 4.59 eV measured by UPS and the corresponding field factor was about 1 400.
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Key words:
- carbon nanotubes /
- chemical vapor deposition(cvd) /
- field emission /
- accelerator
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