Al和C8H8的激光烧蚀深度测量
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摘要: 叙述了采用时间积分的晶体谱仪探测不同发次衬底元素离子谱线强度的相对变化外推激光烧蚀深度的方法，获取了Al和C8H8的激光烧蚀深度，进而推出了Al和C8H8的质量烧蚀速率和烧蚀压。对实验结果进行了分析和讨论。Abstract: A method for measuring laser ablation depth with time-integrated crystal spectrometer is introduced in the paper. Ablation depth, mass ablation rate and ablation pressure for aluminium and C8H8 material driven by laser are obtained from experimental data. Finally the experimental results are analyzed and discussed.
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Key words:
- laser ablation /
- crystal spectrometer /
- mass ablation rate /
- plane layer target.
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