电荷收集法测量低温等离子体密度
Measurement of low-temperature plasma density with charge collectors
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摘要: 利用电荷收集法，在正(135 V)、负(-117 V)偏置和低真空背景(0.5 Pa)三种不同收集条件下，测量了用于等离子体断路开关的电缆等离子体枪产生的低温等离子体的密度和漂移速率，测量值分别为8.3×1014，1.2×1015,4.8×1014 cm-3；2.5,2.0 cm·μs-1。测量结果表明：三种收集条件下测得的等离子体漂移速率相近；在相同测量点处，负偏置收集条件下测得的等离子体密度大于正偏置和低真空背景收集条件下的测量值，而低真空背景收集条件下的测量值最小。Abstract: The density and drift velocity of the low-temperature plasma produced by a cable plasma gun array are measured with charge collectors under positive(135 V) and negative bias(-117 V) and low-pressure air-embedment(0.5 Pa) without bias. The drift velocities under different collecting conditions are close to each other, which are 2.5,2.4,2.0 cm·μs-1 respectively. At the same place, the measured plasma densities are 8.3×1014,1.2×1015,4.8×1014 cm-3 respectively. The density is the greatest with negative bias and the smallest with low-pressure air-embedment.
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Key words:
- low-temperature plasma /
- plasma opening switch /
- charge collector /
- plasma density
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