软X射线多层膜反射镜反射率测量
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摘要: 采用线状激光等离子体作为软X光源,用具有空间分辨的掠入射光栅谱仪对正入射多层膜反射镜进行了反射率测量。谱仪测谱范围20~40nm,谱分辨0.05nm,测得50层C/Al反射镜在中心波长28.6nm处反射率为22%,带宽约为2.5nm。Abstract: Laser-produced line plasmas were used as a broadband source of soft X-rays and a stigmatic grazing incidence grating spectrometer to measure the normal incidence reflectance of concave multilayer mirrors in the 20 ~ 40 nm spectral region. The measurements of the reflectance made on a C/Al multilayer show a little lower than the calculated results and indicate a normal incidence peak reflectance of about 22% at 28.5 nm.
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Key words:
- x-ray multilayer mirror /
- reflectance /
- laser-produced plasmas
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