夹持方式对镜面热变形及偏转的影响
Effects on the mirror's thermo-deformation and deflection of different supporting way
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摘要: 在高功率激光辐照下，激光腔镜的夹持方式对热变形和偏转有很大影响。在理论上，采用ANSYS软件计算了硅镜（80 mm×12.5 mm），在特定辐照条件（100 W，40 mm、均匀、同轴、5 s）下的不同夹持方式下的热变形，径向固定的热变形镜面峰谷值（0.109 3 μm）小于轴向固定的热变形峰谷值（0.138 8 μm），三点固定的（0.121 μm）介于二者之间。在实验上，硅镜（75 mm×12.5 mm）在特定辐照条件（100 W、光斑椭圆17 mm×20 mm，5 s）下，压圈法（径向固定）的热变形为0.32 μm,镜面倾斜角为0.63 μrad;压板法（轴向固定）的热变形0.49 μm,镜面倾斜角为0.28 μrad。当采用三点锥孔定位法时，通过干涉条纹可发现镜面偏转减少。Abstract: The heat-deformation P-V value of Si mirror(80 mm×12.5 mm) fixed in radialfixing way analyzed by ANSYS is 0.109 3 μm, with net irradiation heat 100 W in 5 s by a -40 mm and co-axial uniform laser. And 0.138 8 μm by axialfixing way and 0.121 μm in three points supporting respectively. The experimental result to the Si mirror(75 mm×12.5 mm), fixed in radial-fixing way is 0.32 μm with 100 W heat in 5 s by a 17 mm×20 mm and co-axial uniform laser, and 0.63 μm in axial-fixing way. The experimental mirror deflection is 0.63 μrad by radial-fixing way and 0.28 μrad by axial-fixing way. The deflection is the smallest by threecone supporting way．
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Key words:
- high power laser /
- heat deformation /
- heat deflection /
- supporting way
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