溶胶-凝胶光学薄膜的激光损伤研究
Laser damage of Sol-Gel thin film
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摘要: 采用溶胶-凝胶工艺制备了SiO2与ZrO2单层介质膜，用输出波长1.06μm，脉宽15ns的电光调Q激光系统产生的强激光进行辐照实验。观察了光学薄膜经强激光辐照后的损伤情况，讨论了溶胶凝胶光学薄膜在强激光照射下的损伤机理，提出了溶剂替换、紫外光处理、添加有机粘接剂等提高溶胶凝胶光学薄膜激光损伤阈值的方法。Abstract: In this paper, colloidbased single-layer SiO2 and ZrO2 thin films were deposited on K9 glass and silicon wafer substrates by Sol-Gel spin-coating method. The films were irradiated by a Q-switched Nd:YAG high power laser whose wavelength was 1064nm and its pulse width was １5ns. The morphologies of the damaged films were observed by SEM and microscope. Damage mechanics of the laser were studied. The results show that solventexchange , UV-irradiation and the addition of PVP are effective methods to improve the laser damage threshold of SolGel thin films．
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Key words:
- solgel process /
- laser damage threshold /
- solventexchange /
- uvirradiation /
- organic binder
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