LBO晶体上ZrO2薄膜的显微结构和光学性质
Microstructure and optical properties of ZrO2 thin films on LiB3O5
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摘要: 用电子束蒸发方法在三种不同取向的三硼酸锂（LiB3O5，简称LBO）晶体上沉积了ZrO2薄膜。采用分光光度计和X射线衍射技术对LBO晶体基底结构对薄膜光学性质和显微结构的影响进行了研究。实验结果表明：基底结构对薄膜的显微结构和光学性质具有明显影响，即X-LBO，Y-LBO和Z-LBO上沉积的ZrO2薄膜分别沿m(－212)，m(021)和o(130)择优生长，且m(021)择优取向的ZrO2薄膜具有最高的折射率和最小的晶格不匹配。Abstract: Using an electron beam evaporation technique.ZrO2 thin films were deposited on three kinds of Lithium triborate (LiB305 or LBO) substrates with three different crystalline orientations. The influences of LBO structure on the microstructure and optical properties of ZrO2 thin films were studied by spectrophotometer and X-ray diffraction. The results indicate that the substrate structure has an obvious effect on the microstructure and optical property of the film, namely, the ZrO2 thin film deposited on the X-LBO, Y-LBO and Z-LBO oriented along m(－212), m(021) and o(130) directions. It is also found that the ZrO2 thin film with m(021) has the highest refractive index and the least lattice misfit．
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Key words:
- zro2 /
- lbo crystal /
- electron beam evaporation /
- preferred orientation
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