感应耦合等离子体的1维流体力学模拟
One-dimension hydrodynamics simulation of an inductively coupled plasma
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摘要: 采用双极扩散近似的流体力学模型,通过数值模拟方法研究了射频感应耦合等离子体(ICP)中等离子体密度和电子温度等物理量的空间分布,其中射频源的功率沉积由动力学理论给出。分析了不同的射频线圈的驱动电流和放电气压对等离子体密度和电子温度空间分布的影响。在低气压下,等离子体密度基本上保持空间均匀分布。随着放电压强的增加,等离子体密度的分布呈现出明显的空间不均匀性。当线圈电流增大时,等离子体密度和电子温度都随着增大。Abstract: Based on a one-dimensional hydrodynamics model in which the power deposition is calculated through the kinetics theory, the spatial distributions profile of the plasma density and the electron temperature in the inductively coupled plasma (ICP), were simulated and the influences of the discharge pressure and the coil current on the plasma density and electron temperature were discussed. It has been found that at low pressures, the distributions of the plasma density are basically spatial homogeneity, except near the edge of the discharge equipment. As the pressure increases, the plasma density distribution tends to be evidently spatial inhomogeneous. Both the plasma density and the electron temperature increase as the coil current increases.
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Key words:
- inductively coupled plasma(icp) /
- hydrodynamics /
- plasma density /
- electron temperature
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