X射线用Kirkpatrick-Baez显微镜成像质量的研究
Image quality with Kirkpatrick-Baez microscope in hard X-ray
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摘要: 对惯性约束聚变的一种重要诊断方法-Kirkpatrick-Baez型结构显微镜成像方法进行了研究。计算了Kirkpatrick-Baez型结构显微镜的主要像差，并分析得出：造成轴上点像差的主要因素是球差，占像差的94%。基于光线追迹方法模拟出这种结构的成像过程，比较了不同反射镜长随视场变化对物面分辨率的影响，发现为了保证物面的空间分辨率能达到ICF研究要求视场应尽量控制在200 μm以内。最终得出能量在8 keV、视场为200 μm，分辨率小于10 μm的Kirkpatrick-Baez型结构的模型。提出在装调过程中重要公差计算方法，得到数值孔径为0.003 7时，角度装调公差应在-0.087°~0.067°范围内。Abstract: An important diagnosis method——Kirkpatrick-Baez microscope system in ICF experiments was researched. The brief aberration of the Kirkpatrick-Baez microscope was calculated. The main aberration, spherical aberration was analyzed, and the spherical aberration is 94% of the total aberration. The configuration was simulated by the ray tracing method. Resolutions in different fields and mirror-lengths were compared. The modal of Kirkpatrick-Baez microscope was made in computer with 10 μm resolutionat 8 keV. It was studied about the adjusting tolerance method of Kirkpatrick-Baez microscope. When numerical aperture is 0.003 7, the angle error range is -0.087°~0.067°。
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Key words:
- grazing incidence image system /
- x-rays /
- ray tracing /
- spatial resolution /
- angle error
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