H2及H+对CxH1-x薄膜表面状态的影响
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摘要: 系统研究了H2流量和H+原位处理CxH1-x薄膜的时间对CxH1-x薄膜的稳定时间、表面悬挂键密度和表面电子局域化程度的影响，表明CxH1-x薄膜的长时间H+原位处理是减小CxH1-x薄膜表面悬挂键密度的有效途径。
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关键词:
- CxH1-x薄膜悬挂键密度 /
- 局域化 /
- ICF靶涂层技术
Abstract: In this paper, the steady time of CxH1-x film, the density of the surface dangling band and the localization of the surface electronic state under the different H2 flow rate and the different in-situ treatment time of H+ were investigated. The effective method with which the surface dangling band density is decreased is the long H+ treatment time in-situ.-
Key words:
- cxh1-x film /
- the surface dangling band density /
- localization
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