用金刚石车削技术制备EOS实验用铝薄膜和铜薄膜
Fabrication process of aluminum film and copper film used in EOS experiment by diamond turning technology
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摘要: 具有材料理论密度的金属薄膜对于材料高压状态方程(EOS)研究而言具有重要的意义。本文提出采用金刚石车削技术,利用超精密金刚石车床、金刚石圆弧刀具及真空吸附夹持技术,对纯铝和无氧铜进行端面车削,完成了EOS实验用铝薄膜和铜薄膜的车削加工,实现了薄膜密度接近材料理论密度。精加工工艺参数为:进给量0.001 mm/r,主轴转速3000 r/min,切削深度1 μm。采用Form Talysurf series 2型触针式轮廓仪进行测量,结果表明:铝薄膜、铜薄膜厚度可以达到小于10 μm水平,表面均方根粗糙度小于5 nm,原始最大轮廓峰-谷高度小于50 nm,厚度一致性好于99%。Abstract: Metal films with material theoretical density are important to measurement of equation of state under high pressure. In this paper, an aluminum film and a copper film used in EOS(equation of state) experiment are produced by diamond turning technology. Process parameters of finish machining are given, including the feed rate 0.001 mm/r, the spindle rotate speed 3 000 r/min, and the depth of cutting 1 μm. Then the surface roughness is characterized by a Form Talysurf series 2 device. The results indicate that the thickness of both aluminum film and copper film are less than 10 μm, the surface root mean square roughness less than 5 nm, the primary maximum peak to valley height less than 50 nm and the thickness uniformity more than 99%.
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Key words:
- diamond turning /
- equation of state /
- aluminum film /
- copper film
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