长脉冲激光作用下薄膜表面鼓包的形成机理
Formation mechanism of bubbles in the surface of films induced by long pulse width laser
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摘要: 在光学薄膜的激光损伤实验中，可以在显微镜下观测到激光辐照引起的尺寸较大、形状对称性很好的鼓包。从杂质气化的角度，应用弹性力学的球壳受压膨胀模型，分析薄膜表面鼓包的形成机制，同时得到了相应情况下薄膜的损伤机制。结果表明，半径越大杂质在激光辐照下越容易引起薄膜破坏，填埋得越浅的杂质也越容易引起薄膜破坏。杂质诱导破坏机制下，薄膜的裂纹首先出现在杂质附近的薄膜基体中。在薄膜中出现裂纹的临界状态时，半径越大、填埋得越深的杂质所引起的鼓包尺寸越大、高度越高。这种热力耦合模型，弥补了现有理论的不足，进一步完善了现有理论。Abstract: Bubbles caused by laser irradiation can be observed usually via microscope during the experiments of laser induced damage of films, each bubble looks large and very symmetry. From the point of gasification of impurity, we have analyzed the formation mechanism of bubbles in the surface of films using model of a spherical shell which endures high inner pressure. The results reveal that films are more easily damaged when the size of the inclusion is large or the embedment is shallow. At the first time of damage occurred, the bubble is larger when the size of inclusion or the embedded depth is larger. The coupling model of thermal-elastic makes up the present theory and adapts to higher temperature.
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